A Tunable Micromass Sensor Based on Modal Localization Effect

A localized, micro-mass technology, applied in the field of micro-electromechanical systems, can solve the problem of not being able to greatly improve the sensitivity, and achieve the effect of easy adjustment of the driving mode, simple structure design, and realization of sensitivity

Active Publication Date: 2022-02-25
DALIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although these methods of enhancing the sensitivity of single-degree-of-freedom resonators are sufficient for most applications, these methods have their own limitations and cannot greatly improve the sensitivity

Method used

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  • A Tunable Micromass Sensor Based on Modal Localization Effect
  • A Tunable Micromass Sensor Based on Modal Localization Effect
  • A Tunable Micromass Sensor Based on Modal Localization Effect

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Embodiment 1

[0053] Such as figure 1 Shown is the structural representation of the present invention, as figure 2 As shown, it is a commonly used modal localized sensor structure coupled with a mechanical structure, wherein the first cantilever beam 2-2 and the second cantilever beam 2-3 are respectively fixed by the fixed end '2-1, and the first cantilever beam 2-2 and the second cantilever beam 2-3 are coupled through a mechanical coupling 2-4, and the fixed excitation electrode '2-5 is jointly driven by the alternating current and the direct current generated by the driving voltage source '2-6.

[0054] Compared with the mechanical coupling structure, the electrostatic coupling adopted in the present invention can adjust the coupling strength in real time. Such as image 3 Shown is in the embodiment of the present invention, when according to the size in the structure parameter table 1 of the present invention, the micromass sensor of the present invention is in the amplitude-frequen...

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Abstract

The present invention provides an adjustable micro-mass sensor based on the mode localization effect, which is characterized in that it comprises: a first fixed support beam placed above, and its two ends are fixed by the first fixed end; a second fixed support beam, placed under the first fixed beam, and its two ends are fixed by the second fixed end; wherein, the electrostatic coupling is realized between the first fixed beam and the second fixed beam through the coupling electrode, and the second fixed beam is fixed through the excitation electrode The size of the driving force is adjusted; the lengths of the first fixed beam and the second fixed beam are both variable and not equal in length. The invention realizes online adjustment of sensor sensitivity, detection range and resolution by adjusting the electrostatic stiffness between coupling electrodes. The invention has higher sensitivity, can compensate for the influence of manufacturing errors, can be used for detection of microorganisms, micro particles, etc., and has the advantages of high sensitivity, strong robustness and the like.

Description

technical field [0001] The present invention relates to the technical field of micro-electro-mechanical systems, in particular to an adjustable micro-mass sensor based on mode localization effect. Background technique [0002] Microelectromechanical systems (MEMS) resonant sensors have gradually received more and more attention in the measurement of tiny masses because of their high efficiency and simplicity, including the identification and detection of biomolecules (DNA, cells, bacteria and viruses, etc.) , detection of tiny particles, and detection of liquid and gas components and concentrations have been widely used. [0003] In recent years, attention has been drawn in the study of how to improve the sensitivity of mass sensors. Some achieve improvements in sensitivity through miniaturization of sensor size, optimization of geometry, or excitation of nonlinear schemes. Zhao Jian et al. proposed a novel resonant mass sensor design in "Anew sensitivity improving approac...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N5/02G01G17/00
CPCG01N5/02G01G17/00
Inventor 赵剑吕明刘蓬勃
Owner DALIAN UNIV OF TECH
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