Micro-electromechanical system-based micro-system for enhanced permeation-enhancing skin drug release and manufacturing method thereof

Abstract

The invention provides a microelectromechanical system-based drug release microsystem for enhanced permeation through the skin and a manufacturing method thereof. The system includes: a first silicon substrate, a second silicon substrate and a first SOI silicon substrate bonded together from bottom to top; a microneedle array composed of several microneedles is formed on the first silicon substrate, Each microneedle includes a microneedle tip, a microneedle body, and a microneedle cavity; a drug storage cavity is formed between the first silicon chip substrate and the second silicon chip substrate, and the drug storage cavity and the microneedle array Each microneedle cavity is connected; a drug delivery hole is opened on the top of the second silicon chip substrate, and the drug delivery hole communicates with the drug storage cavity; the second silicon chip substrate and the first SOI silicon chip The space includes a partition wall layer, a vibrating film layer and a supporting wall layer from bottom to top; the first SOI silicon chip, the supporting wall layer and the vibrating film layer cooperate to form a micro-ultrasonic sensor; between the partition wall layer and the top of the second silicon chip substrate A cavity communicating with the drug delivery hole is formed.

Description

technical field [0001] The invention relates to the technical fields of microelectromechanical systems and biomedical engineering, in particular to a microelectromechanical system based on a microelectromechanical system for enhancing permeation and skin drug release and a manufacturing method thereof. Background technique [0002] In medical practice, treating diseases with drugs is a common medical treatment. The therapeutic effect of this method is not only dependent on the drug itself, but also affected by the way of administration. The traditional oral and injection drug delivery methods are simple and convenient to operate, and are suitable for the treatment of many diseases. However, there are certain problems in the treatment process. For example, when taken orally, due to the digestion of the gastrointestinal tract and the first-pass effect of the liver, some drug molecules are easily decomposed, resulting in reduced drug efficacy. In addition, after taking the m...

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Problems solved by technology

[0005] In order to solve the problem of low permeability of the existing microneedles in the epidermis and dermis when the medicine is administered, the present invention provides a microelectromechanical system-based micro-system for enhancing permeation and skin drug release and its manufacture. method, the system combines microneedle drug delivery technology with ultrasonic penetration enhancement technology, which avoids the disadvantages of injection methods and can improve the penetration rate and absorption rate of drug solutions in subcutaneous tissue

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