A kind of alkali metal seed injection device
An injection device, alkali metal technology, applied in the direction of ion implantation plating, electromechanical device, metal material coating process, etc., to achieve the effect of improving conductivity, improving uniformity, and improving quality
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[0021] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0022] Such as figure 1 As shown, the alkali metal seed injection device of the present invention is cylindrical, the side wall of the device is a sandwich structure, and a chamber is formed between the sandwich inner wall 10 and the sandwich outer wall 11 . The electric heater 1 is located in the chamber on the side wall, and is used for heating and driving gas working fluid and alkali metal seeds. A driving gas inlet pipe 7 is installed at the bottom of the alkali metal seed injection device; a gas-driven cyclone separator 4 is arranged inside the cylinder of the alkali metal seed injection device, and the gas-driven cyclone separator 4 is fixed on the bottom of the cylinder through a support. The liquid level monitoring sensor 5 is arranged on the gas driven cyclone separator 4 .
[0023] One end of the alkali metal seed injection pipe 2 ...
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