A CVD diamond growth online detection method and system
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A detection method and detection system technology, applied in measurement devices, metal material coating processes, instruments, etc., can solve the problems of long diamond cycle, prone to downtime, complicated calculation, etc., achieve uniform growth rate and improve product quality. quality effect
Active Publication Date: 2021-06-25
CHANGSHA ADVANCED MATERIALS IND RES INST CO LTD
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[0004] The patent document with the invention number 201810877406.6 discloses an automatic detection device for surface defects of polycrystalline diamond composite sheets. The detection is performed using a visual detection device. The calculation is relatively complicated and certain hardware equipment is required for normal operation. Long, in the case of long-term operation, it is prone to downtime
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Embodiment 1
[0042] Please also refer to Figure 1-3 , the present invention provides a kind of CVD diamond growth on-line detection method, comprising steps:
[0043] S1. The detection device 3 detects the diamond growth thickness in real time, generates and transmits the thickness data to the control center 4;
[0044] S2, the control center 4 generates a real-time growth curve according to the thickness data, the control center 4 reads the current diamond growth environment data, and compares the real-time growth curve with the comparison data of the same environment data according to the environment data right;
[0045] S3. Controlling related operations of diamond growth according to the comparison result.
[0046] As a preferred solution, in this embodiment, the detection device is a position sensor; the real-time detection is detection once at predetermined time intervals. Because the diamond has a long growth cycle, and the height of the growth is generally tens of microns or ev...
Embodiment 2
[0069] Please focus on image 3 , the present invention also provides a CVD diamond growth on-line detection system, including a detection device 3, a control center 4, and a storage module 5;
[0070] The detection device 3 is used to detect the surface position of the diamond in real time, generate and output thickness data;
[0071] The storage module 5 is used to store the comparison data and real-time detection data;
[0072] The control center 4 is used to receive the thickness data, read the comparison data in the storage module 5, perform data comparison, and control the operation of the equipment according to the comparison result.
[0073] As a preferred solution, in this embodiment, an alarm device (not shown) is also included; the alarm device includes an LED and a loudspeaker.
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Abstract
The invention relates to the field of diamond growth, in particular to a CVD diamond growth online detection method and system. An on-line detection method for CVD diamond growth, comprising steps: S1, a detection device detects the diamond growth thickness in real time, generates and transmits thickness data to a control center; S2, the control center generates a real-time growth curve according to the thickness data, and the control center reads Take the current diamond growth environment data, and compare the real-time growth curve with the comparison data of the same environment data according to the environment data; S3, control related operations of diamond growth according to the comparison result. Compared with the prior art, a CVD diamond growth online detection method provided by the present invention has achieved the following technical effects: the growth thickness of a single diamond, multiple diamonds, and polycrystalline diamond films can be measured, and real-time monitoring and recording can be performed. data.
Description
technical field [0001] The invention relates to the field of diamond growth, in particular to a CVD diamond growth online detection method and system. Background technique [0002] Diamond has attracted everyone's attention due to its excellent physical and chemical properties. However, natural diamond reserves are limited, so people have developed a variety of synthetic diamond methods, such as high temperature and high pressure (HPHT), hot wire chemical vapor deposition (HJCVD). Among them, microwave plasma chemical vapor deposition method (Microwave plasma chemical vapor deposition) synthetic diamond method can synthesize high-quality, large-area diamond because there is no introduction of impurities. [0003] The quality of diamond synthesized by MPCVD is related to many factors, including carbon source concentration, gas flow rate, gas flow ratio, substrate stage height, microwave power, synthesis temperature, etc. In the process of batch synthesis of diamonds, any ch...
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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/27C23C16/511G01B21/08G01B11/06
CPCC23C16/274C23C16/511G01B11/0608G01B21/08
Inventor 彭国令黄翀
Owner CHANGSHA ADVANCED MATERIALS IND RES INST CO LTD
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