A Micro-displacement Platform Driven by Piezoelectric Ceramics

Abstract

The invention relates to a micro-displacement output platform with a two-stage amplifying mechanism, which is mainly composed of a driving part, an amplifying part, a motion executing part and a measuring part. Among them, the driving part is mainly realized by piezoelectric ceramics, and the preloading of piezoelectric ceramics is realized by the disc spring; the amplifying part is composed of traditional hinges and flexible hinges; the measuring part is composed of ultrasonic-based measuring devices. The micro-displacement mechanism of the present invention has high output displacement accuracy and fast dynamic response, and the characteristics of the disc spring keep the preload constant during the output displacement process of the piezoelectric ceramics, and the symmetrical distribution of the hinge can effectively eliminate parasitic displacement. The micro-displacement mechanism of the invention overcomes the shortcoming that only small displacement output can be realized by using piezoelectric ceramics, and can realize the stepless amplification of the output displacement of piezoelectric ceramics by adjusting the mechanism according to actual needs, and realizes multi-scale from nanometer level to millimeter level. output precision. The invention can be applied to correct the accuracy of the ultrasonic probe when measuring the fixed film thickness.

Description

Technical field: [0001] The invention belongs to the field of mechanical precision displacement driving, in particular to a micro-displacement platform driven by piezoelectric ceramics. Background technique: [0002] Since mechanical parts such as gears and bearings rely on lubricants (oil, water, etc.) to reduce friction and wear during use, the thickness of the oil film or water film has a crucial impact on the performance and use time of mechanical parts. If the film thickness is too thin, the surfaces of the parts will be in direct contact. After a period of time, the friction and temperature between the parts will increase sharply, resulting in wear and even serious mechanical operation accidents. However, if the film thickness is too thick, it will reduce the performance of the equipment. The bearing capacity makes it unable to work stably, resulting in excessive energy loss and oil leakage (water). Therefore, monitoring and calibrating the thickness of oil film or wa...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the above-mentioned defects in the prior art, and it is necessary to design a new type of micro-displacement platform to overcome the problems of single amplification ratio, poor replaceability, and low output rigidity of the traditional piezoelectric ceramic amplification mechanism.

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