Radio frequency probe card device and spacing conversion board thereof
A probe card and conversion board technology, applied in the field of probe cards, to achieve the effect of less loss in the transmission process
Active Publication Date: 2020-02-21
CHUNGHWA PRECISION TEST TECH
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Problems solved by technology
[0005] The embodiment of the present invention is to provide a radio frequency probe card device and its pitch conversion board, which can effectively improve the possible defects of the existing probe card
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[0022] see Figure 1 to Figure 4 , which is an embodiment of the present invention. What needs to be explained first is that this embodiment corresponds to the relevant quantities and shapes mentioned in the drawings, and is only used to specifically illustrate the implementation of the present invention, so as to facilitate the understanding of the content of the present invention. , not to limit the protection scope of the present invention.
[0023] Such as figure 1 with figure 2 As shown, this embodiment discloses a radio frequency probe card device 1000, which can be used to test an object under test (not shown in the figure, such as a semiconductor chip). What needs to be explained first is that, in order to facilitate the understanding of this embodiment, the accompanying drawing is a partial cross-sectional schematic diagram of the radio frequency probe card device 1000 described above.
[0024] The radio frequency probe card device 1000 includes a pitch conversion...
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The invention discloses a radio frequency probe card device and a spacing conversion board thereof. The spacing conversion board comprises a main board body and an extension board body; the main boardbody comprises a plurality of insulating layers and a plurality of conductive layers arranged on the insulating layers respectively; the main board body comprises a first board surface, a second board surface and an annular side edge located between the first board surface and the second board surface; the extension board body comprises a long-strip-shaped isolation layer and a transmission layer; one of the plurality of insulating layers integrally extends out of the annular side edge so as to form the isolation layer; the transmission layer is attached to the isolation layer; the conductivelayer adjacent to the isolation layer integrally extends out of the annular side edge so as to form the transmission layer; the extension board body is of a bendable structure; and the free end of the transmission layer is electrically coupled to a test machine. Therefore, the spacing conversion board can directly transmit a part of signals to the test machine through the transmission layer without the use of a circuit board required, and therefore, the loss of the transmission process of the signals is less, and a test result is not easy to distort.
Description
technical field [0001] The invention relates to a probe card, in particular to a radio frequency probe card device and a distance conversion board thereof. Background technique [0002] A conventional probe card includes a plunger, a flexible circuit board partially disposed on the end surface of the plunger, and a plurality of detection bumps fixed on the flexible circuit board. Wherein, each of the detection bumps has no elasticity, and the detection bumps are used to abut against and electrically couple to an object under test, and transmit corresponding signals through the above-mentioned flexible circuit board. [0003] However, due to the high dissipation factor (DF) of the flexible printed circuit board, the flexible printed circuit board is prone to large losses during the signal transmission process, and the water absorption rate of the material is also high, so In micro-pitch applications, there is a risk of leakage, so the existing structure of the probe card is ...
Claims
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IPC IPC(8): G01R1/073G01R31/28
CPCG01R1/07307G01R31/2822
Inventor 李文聪谢开杰
Owner CHUNGHWA PRECISION TEST TECH