MEMS intelligent 3D sensing technology-based micro-dynamic three-dimensional sensor and system

Abstract

The invention discloses a MEMS intelligent 3D sensing technology-based micro-dynamic three-dimensional sensor and system. The MEMS intelligent 3D sensing technology-based micro-dynamic three-dimensional sensor a laser emission unit, a laser detection unit and a timer; the laser emission unit emits a laser beam; the laser detection unit detects a returned laser beam to form electric signals; the timer is connected with the laser emission unit and the laser detection unit; the laser emission unit comprises a laser and an MEMS micro-galvanometer; laser emitted by the laser device is reflected bythe MEMS micro-galvanometer and is emitted outwards; the laser beam is modulated to be synthesized into a plurality of single-color laser beams; the light intensity of each single-color laser beam iscontrolled to change according to a specific program; the MEMS micro-galvanometer reflects the scanning laser so as to form a required pattern on one reflecting surface; infrared laser is adopted as alaser light source; and with MEMS micro-galvanometer scanning and laser ranging technologies integrated, the detector receives signals reflected by the scanning laser from each point of a scanned surface and calculates the flight time of the infrared laser, and then, the 3D coordinate data of a scanned area can be collected.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a micro-dynamic three-dimensional sensor and system based on MEMS intelligent 3D sensing technology. Background technique [0002] At present, there is a lack of technology to develop and produce 3D lidar in China. Lidar usually has four performance metrics: ranging resolution, scanning cycle, angular resolution, and visual range. The two-dimensional lidar of the sweeping robot is not much different from that of foreign countries. However, these radars basically imitate the design ideas of foreign products, and there is no breakthrough. Practice has proved that the dynamic radar characterized by mechanical rotation scanning is structurally difficult to withstand long-term high-speed vehicle operation, and must be replaced by a more reliable structure, that is, semi-dynamic or solid-state radar. [0003] MEMS micro-vibration mirror is a micro-lens that can quickly rotate back and forth w...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems of complex structure and poor reliability of the existing technology, which cannot operate in a dynamic environment for a long time, the present invention provides a micro-dynamic three-dimensional sensor and system based on MEMS intelligent 3D sensing technology, which has a stable structure and high reliability, and can Long-term work in dynamic environments while maintaining accuracy

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