Method for improving hit battery electrode contact resistance and conductivity, electrode manufacturing method
A technology for battery electrodes and manufacturing methods, which is applied to circuits, electrical components, semiconductor devices, etc., can solve the problems of rising battery series resistance, high grid line conductivity, and high contact resistance, and achieve lower resistivity, lower conduction resistance, and lower The effect of contact resistance
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Embodiment 1
[0051] This embodiment provides a method for making electrodes on HIT cell silicon, including:
[0052] Step 1: Provide a silicon wafer. The silicon wafer generally includes an n-type c-Si substrate, i-type a-Si and p-type a-Si covering the front and back sides in sequence, and a TCO layer on the surface.
[0053]Step 2, making a metal layer on the surface of the silicon chip as a seed layer, the seed layer is mainly nano-metal (mainly silver or aluminum or its alloy, particle size below 500nm), the thickness after the process is below 10um, and the width is controlled below 30um, which can be Transfer to the front and back of the silicon wafer by inkjet, laser transfer, screen printing or other methods.
[0054] Step 3: Carry out the first heat treatment on the seed layer, the first heat treatment adopts laser selective area irradiation, and scans the seed layer to ensure that the spot will not be irradiated to the non-seed layer area; the spot size of the laser irradiation i...
Embodiment 2
[0058] This embodiment provides a method for making electrodes on HIT cell silicon, including:
[0059] Step 1: Provide a silicon wafer. The silicon wafer generally includes an n-type c-Si substrate, i-type a-Si and p-type a-Si covering the front and back sides in sequence, and a TCO layer on the surface.
[0060] Step 2, making a metal layer on the surface of the silicon chip as a seed layer, the seed layer is mainly nano-metal (mainly silver or aluminum or its alloy, particle size below 500nm), the thickness after the process is below 10um, and the width is controlled below 30um, which can be Transfer to the front and back of the silicon wafer by inkjet, laser transfer, screen printing or other methods.
[0061] Step 3: Carry out the first heat treatment on the seed layer, the first heat treatment adopts laser selective area irradiation, and scans the seed layer to ensure that the spot will not be irradiated to the non-seed layer area; the spot size of the laser irradiation ...
Embodiment 3
[0065] This embodiment provides a method for making electrodes on HIT cell silicon, including:
[0066] Step 1: Provide a silicon wafer. The silicon wafer generally includes an n-type c-Si substrate, i-type a-Si and p-type a-Si covering the front and back sides in sequence, and a TCO layer on the surface.
[0067] Step 2, make a metal layer on the surface of the silicon chip as a seed layer, the seed layer is mainly nano-metal (mainly silver and aluminum or its alloy, particle size below 500nm), the thickness after the process is below 10um, and the width is controlled below 30um, which can be Transfer to the front and back of the silicon wafer by inkjet, laser transfer, screen printing or other methods.
[0068] Step 3: Carry out the first heat treatment on the seed layer, the first heat treatment adopts laser selective area irradiation, and scans the seed layer to ensure that the spot will not be irradiated to the non-seed layer area; the spot size of the laser irradiation i...
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Abstract
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