Highly stable polarization maintaining beam combining device and method

Abstract

A polarization maintaining beam combining device, the beam combining device includes several light sources, N single-mode polarization-maintaining optical fibers, N fiber collimators, fiber couplers and beam combining prisms; wherein, several light sources respectively emit linearly polarized beams of different wavelengths The light is coupled into N single-mode polarization-maintaining fibers for transmission, and after passing through N fiber collimators, it outputs linearly polarized collimated beams of different wavelengths and enters the beam combining prism. After being combined by the beam combining prism, it is coupled through the fiber The filter is coupled into the single-mode polarization-maintaining fiber, and then a beam of polarized collimated light with different wavelengths is output after passing through the fiber collimator. The highly stable polarization-maintaining beam combining device and method of the present invention can combine multiple beams of linearly polarized light with different wavelengths into one coaxial output beam with different wavelengths, and the polarization states of multiple wavelength beams remain highly consistent.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a highly stable polarization-maintaining beam combining device and method. Background technique [0002] The development trend of information technology follows Moore's Law, Moore's Law and Metcalf's Law. The continuous improvement of integrated circuit integration is closely related to the continuous development of photolithography technology. In a sense, the birth of a new generation of integrated circuits represented the most advanced lithography technology at that time. Integrated circuit fabrication requires extensive photolithography steps, which typically account for about 30 percent of production costs. In the main process of lithography, alignment and exposure are the most important process links in the manufacture of integrated circuits. Improving the fineness of exposure patterns and the alignment accuracy between patterns is the key to the m...

AI Technical Summary

Problems solved by technology

[0005] In the prior art, planar dichroic mirrors are used to combine beams of different wavelengths, which are mainly used in the fields of medical treatment and projection display. The requirements for the polarization state and coaxiality of the beams are not high, and the planar dichroic mirrors are not easy to be stably clamped. However, there are problems such as deviation in the transmission direction of the transmitted beam, which is not easy to adjust the position of the beam, and is not conducive to ensuring the stability of the coupling efficiency of the single-mode polarization-maintaining fiber.

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