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Highly efficient microdevices

A technology of nano-pillars and active layers, applied in electrical components, circuits, semiconductor devices, etc., can solve problems such as low efficiency of micro-devices

Pending Publication Date: 2020-03-27
VUEREAL INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In conventional microdevice fabrication methods, the main challenge is intrinsic defects in the epitaxial layer and sidewalls, which lead to inefficiency of the microdevice

Method used

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Embodiment Construction

[0039] Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

[0040] As used in the specification and claims, the singular forms "a / an" and "the" include plural referents unless the context clearly dictates otherwise.

[0041] In this disclosure, the terms 'nanostructure', 'nanopillar' and 'nanowire' are used interchangeably. 'Nanostructures', 'nanopillars' and 'nanowires' can be defined as structures whose thickness or diameter is limited to tens of nanometers or less and whose length is not limited.

[0042] In this disclosure, the terms 'device', 'vertical device' and 'micro-device' are used interchangeably.

[0043] Light emitting diodes (LEDs) and LED arrays can be classified as vertical solid state devices. A microdevice can be a sensor, LED or any other solid state device grown, deposited or monolithically fabricated on a substrate. Th...

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Abstract

Highly efficient microdevices are provided. Methods and structures are disclosed for highly efficient vertical devices. The vertical device comprising a plurality of planar active layers formed on a substrate, at least one of a top layer of the plurality of the layers is formed as a plurality of nano-pillars and a passivation layer formed on a space between the plurality of the nanopillars.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 62 / 733,434, filed September 19, 2018, and U.S. Provisional Patent Application No. 62 / 793,017, filed January 16, 2019, which Incorporated herein in its entirety by reference. technical field [0003] The present disclosure relates to the development of high performance microdevices, and more particularly, to nanopillar hybrid microdevices with improved luminous efficiency. Background technique [0004] Light emitting diodes (LEDs) and LED arrays can be classified as vertical solid state devices. A microdevice can be a sensor, light emitting diode (LED) or any other solid state device grown, deposited or monolithically fabricated on a substrate. In conventional microdevice fabrication methods, a major challenge is intrinsic defects in epitaxial layers and sidewalls, which lead to inefficiency of the microdevice. Therefore, improved fabricatio...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L33/20H01L33/44H01L33/14H01L33/00
CPCH01L33/20H01L33/14H01L33/44H01L33/0037H01L33/38H01L33/385H01L33/36H01L33/58H01L33/005H01L33/62H01L33/0075
Inventor 格拉姆雷扎·查济埃桑诺拉·法蒂侯赛因·扎马尼·西博尼李云汉
Owner VUEREAL INC