Unlock instant, AI-driven research and patent intelligence for your innovation.

A six-degree-of-freedom magnetic levitation turntable, control system and method

A technology of a control system and a control method, applied in the field of magnetic levitation, can solve the problems of low platform stiffness, low thrust density, and less freedom of movement.

Active Publication Date: 2021-09-14
WUHAN UNIV
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the shortcomings of the existing rotary table, such as complex structure, less freedom of movement, high friction, low platform rigidity and low thrust density, the present invention proposes a neutron-symmetrical magnetic levitation turntable, which is easy to manufacture and assemble, and has a dense coil array The arrangement increases the thrust density and platform rigidity, and the turntable has the ability of multi-degree-of-freedom movement, which can be widely used in various fields such as micro-milling and optical antenna tracking system

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A six-degree-of-freedom magnetic levitation turntable, control system and method
  • A six-degree-of-freedom magnetic levitation turntable, control system and method
  • A six-degree-of-freedom magnetic levitation turntable, control system and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0032] Such as figure 1 and figure 2 As shown, the six-degree-of-freedom magnetic levitation turntable of the present invention is mainly composed of an elliptical target 11, a circular stage 10, a permanent magnet array 9, a coil support 7, a coil array 8, a square base 4, an upper surface sensor support 5 and an upper The end surface photoelectric sensor 6, the lower end surface sensor bracket 12 and the lower end surface photoelectric sensor 13, the vertical support frame 3, the horizontal support frame 2, and the optical vibration isolation platform 1 are composed. Among them, the elliptical target 11, the circular stage 10, and the permanent magnet array 9 arranged in a circular shape are the mover part of the system, and the coil support 7, the coil array 8, the square base 4, the vertical support frame 3, The horizontal support frame 2 and the optical vibration isolation platform 1 constitute the stator part of the system. The system maintains a stable non-mechanical...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a six-degree-of-freedom magnetic levitation turntable, a control system and a method, comprising an optical vibration isolation platform, a horizontal support frame, a vertical support frame, a platform base, a coil support, a coil array, a magnet array, and a circular object stage , an elliptical target, a photoelectric sensor around the coil and its bracket, a photoelectric sensor under the coil and its bracket. The invention has the characteristics of simple structure, many degrees of freedom of movement, high bearing rigidity, high thrust density, high rotation precision, and vacuum compatibility, and can be widely used in the fields of micromachining, radar, and optical antenna tracking systems.

Description

technical field [0001] The invention belongs to the technical field of magnetic levitation, and in particular relates to a high-precision six-degree-of-freedom magnetic levitation turntable, which can be used for micromachining, aerospace vehicle simulation turntable and the like. Background technique [0002] Precision turntables have important application value in modern science and production, such as micromachining, spacecraft simulation test platform, laser communication optical antenna tracking system, etc. This rotary table is a high-precision equipment that requires low friction, high positioning accuracy, fast response, and high structural rigidity. Almost all existing precision turntables can only achieve single-degree-of-freedom rotary motion, which limits the application range of precision turntables. Especially in the fields of semiconductor processing and tactile feedback systems, the positioning platform not only needs a wide range of angular rotation, but al...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H02N15/00
CPCH02N15/00
Inventor 许贤泽鲁兴徐逢秋
Owner WUHAN UNIV