A high-precision detection device and detection method for one-dimensional spherical or cone-shaped socket arrays
A detection device and high-precision technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of one-dimensional ball or cone-socket array precision traceability, etc., and achieve cost saving, high measurement accuracy and flexible measurement methods Effect
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[0027] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.
[0028] like figure 1 , 5 As shown, a high-precision detection device of a one-dimensional ball or cone-and-socket array includes an L-shaped base 4, a one-dimensional ball or cone-and-socket array 2, and the L-shaped base has an L-shaped horizontal portion and a vertical portion. structure, the surface of the vertical part of the L-shaped base 4 is fixedly connected with a one-dimensional ball array or cone array 2, and the horizontal part of the L-shaped base 4 is fixedly connected with a one-dimensional high-precision translation table 1, and the one-dimensional high-precision A measuring head 3 is fixed on the precision displacement platform 1; image 3 , 6 As shown, the measuring head includes a fixed base 33 fixed on a one-dimensional high-precision displacement stage, and a lens 32, a beam splitter 3...
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