A high-precision detection device and detection method for one-dimensional spherical or cone-shaped socket arrays

Abstract

The invention discloses a high-precision detection device for a one-dimensional ball or cone-and-socket array, which includes an L-shaped base, a one-dimensional ball or cone-and-socket array, and the L-shaped base has an L-shaped structure with a horizontal part and a vertical part. The surface of the vertical part of the L-shaped base is fixedly connected with a one-dimensional ball array or cone-socket array, and the horizontal part of the L-shaped base is fixedly connected with a one-dimensional high-precision translation platform, and a one-dimensional high-precision translation platform is fixed on the one-dimensional high-precision translation platform Measuring head; the measuring head includes a fixed base, on which a lens, a beam splitter and a laser are sequentially installed in a straight line, a four-quadrant detector is fixed on one side of the beam splitter, and a four-quadrant detector is arranged on the four-quadrant detector A power supply interface and a signal output interface, the signal output interface is connected to a corresponding channel port of the data acquisition module. The method can measure the distance between the centers of two standard spheres and the two cone sockets through geometric operations. It solves the problem of cone dimple precision calibration, makes the performance evaluation process simpler and more convenient, and saves the measurement cost.

Description

technical field

[0001] The invention belongs to the technical field of length verification, and relates to a high-precision detection device and a detection method of a one-dimensional ball or cone socket array. Background technique

[0002] Aiming at the problem of traceability of the accuracy of the one-dimensional ball or cone-socket array used in the performance evaluation of the articulated arm coordinate measuring machine or the laser tracker, the high-precision three-dimensional coordinate measuring machine or special measuring equipment is mainly used for calibration. However, when using the above method to calibrate the one-dimensional ball array, the calibration accuracy has reached a high level, but there are fitting errors. For the calibration of cone-dimple accuracy, due to its special structural problems, neither the three-dimensional coordinate measuring machine nor the special measuring instrument can solve the problem of its accuracy calibration. To solve t...

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