Micro-objective distortion testing device and testing method
A technology of microscopic objective lens and testing device, which is applied in the field of optical detection, can solve the problems of low measurement accuracy and achieve the effect of improving measurement accuracy
Active Publication Date: 2020-04-21
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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[0003] The purpose of the present invention is to overcome the defects of the prior art, in order to solve the problem of low measurement accuracy of the existing microscopic objective lens distortion testing method, a kind of microscopic objective lens distortion testing device and testing method are proposed, through laser confocal technology Measure the distortion of the microscope objective lens to improve the test accuracy
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[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0032] refer to figure 1 and figure 2 As shown, the embodiment of the present invention provides a microscopic objective lens distortion testing device, including: a laser confocal system 1 and a spherical mirror 2, the laser confocal system 1 is arranged on the incident direction of the microscopic objective lens 3 to be tested, and the spherical surface The reflector 2 is arranged on the image plane of the microscopic objective lens 3 to be tested. The light beam emitted by the laser confocal system 1 passes through the microscopic objective lens 3 to be tested and enters the spher...
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The invention discloses a micro-objective distortion testing device and a micro-objective distortion testing method. The micro-objective distortion testing device comprises a laser confocal system anda spherical reflector, wherein the laser confocal system comprises a light source, a collimating mirror, a spectroscope, a focusing mirror, a pinhole imaging plate, an imaging micro-objective and a CCD detector; a light beam emitted from the light source irradiates the spectroscope after being collimated by means of the collimating mirror; the light beam is refracted by the spectroscope, penetrates through a micro-objective to be measured and then is focused on the spherical reflector; the light beam is reflected back to the spectroscope by means of the spherical reflector along the originalpath, then reflected to the focusing mirror by means of the spectroscope and focused to the pinhole imaging plate by means of the focusing mirror for pinhole imaging; and an image formed by means of the pinhole imaging plate is amplified by using the imaging micro-objective and then received by means of the CCD detector. Through introducing the laser confocal system, the measurement precision depends on the precision of the CCD detector, and compared with a traditional distortion test method, the measurement precision can be improved.
Description
technical field [0001] The invention relates to the technical field of optical detection, in particular to a microscope object lens distortion test device and a test method. Background technique [0002] The large field of view optical system can provide efficient utilization, but the increase of the field of view requires that the distortion of the optical system should be small enough, especially for high-precision systems such as microscopic objectives, which have a greater impact on the size of the distortion. Strict requirements, which put forward more stringent requirements for the test method of microscope objective lens distortion. At present, there are two main methods for measuring distortion, which are precision length measurement method and precision angle measurement method. The precision length measurement method refers to using a calibrated grid plate to image through the optical system under test, and using precision measuring instruments to measure the dist...
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Login to View More IPC IPC(8): G01M11/02G01B11/02
CPCG01B11/02G01M11/0242
Inventor 杨国庆何锋赟包兴臻董健
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI