Silicon wafer coating equipment and paddle thereof

A technology for coating equipment and silicon wafers, applied in sustainable manufacturing/processing, climate sustainability, semiconductor devices, etc., can solve problems such as uneven coating of silicon wafers, high production costs, and affecting air flow

Active Publication Date: 2020-04-28
ZHEJIANG JINKO SOLAR CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

During the diffusion process, the paddle itself occupies a certain position in the furnace tube. Since the existing contact surface between the paddle and the quartz boat is solid, it affects the circulation of the air flow, and the distance between the

Method used

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  • Silicon wafer coating equipment and paddle thereof
  • Silicon wafer coating equipment and paddle thereof
  • Silicon wafer coating equipment and paddle thereof

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Embodiment Construction

[0026] In order to enable those skilled in the art to better understand the solution of the present application, the present application will be further described in detail below in conjunction with the drawings and specific implementation methods. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0027] In the following description, a lot of specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do it without departing from the meaning of the present invention. By analogy, the present invention is therefore not limited to the specific examples disclosed bel...

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Abstract

The invention discloses a paddle of silicon wafer coating equipment, which comprises a paddle plate, a paddle blade and an inclined connecting plate, wherein the paddle plate is used for bearing a quartz boat, and the paddle plate is a hollowed-out paddle plate; the paddle blade is in contact with a furnace mouth of the silicon wafer coating equipment, and the upper surface of the paddle blade ishigher than the upper surface of the paddle plate; and the inclined connecting plate is used for connecting the paddle plate and the paddle blade. According to the invention, the paddle comprises thepaddle plate, the paddle blade and the inclined connecting plate, the paddle plate used for bearing the quartz boat is the hollowed-out paddle plate, after the quartz boat is placed on the paddle plate, the contact area between the paddle plate and the quartz boat is reduced, hollowed-out airflow can directly circulate above and below the paddle plate, the uniformity of silicon wafer coating is enhanced, EL of a battery piece is improved, the use amount of paddle plate materials can be reduced, and the manufacturing cost of the paddle is reduced. In addition, the invention further provides silicon wafer coating equipment with the advantages.

Description

technical field [0001] The present application relates to the technical field of photovoltaic cell manufacturing, in particular to a silicon wafer coating device and paddles thereof. Background technique [0002] In the silicon wafer manufacturing process, a very important step is to coat the silicon wafer surface to reduce the reflectivity of light on the silicon wafer surface, enhance the passivation effect of the silicon wafer surface, and reduce the recombination of carriers. [0003] During coating, the mechanical gripper transports the quartz boat carrying the silicon wafer to the paddle of the furnace tube, and the paddle transports the quartz boat carrying the silicon wafer into the furnace tube for diffusion. During the diffusion process, the paddle itself occupies a certain position in the furnace tube. Since the existing contact surface between the paddle and the quartz boat is solid, it affects the circulation of the air flow, and the distance between the paddle ...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L31/18
CPCH01L21/67005H01L31/18Y02P70/50
Inventor 赵迎财金井升张昕宇
Owner ZHEJIANG JINKO SOLAR CO LTD
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