High-voltage stability measurement and early warning device of electron microscope

Abstract

The invention relates to a high-voltage stability measurement and early warning device of an electron microscope. The device comprises an electron microscope high-voltage power box (1), a high-voltageresistor (2), a sampling resistor (3), a high-voltage capacitor (4), a data acquisition and calculation system (5), and an alarm (6). The device is suitable for measuring stability of a high-voltagesystem of the electron microscope. An electron microscope high-voltage power supply is an important component of the electron microscope, provides an electron acceleration voltage for the electron microscope to generate an electron beam with a single wavelength, and is a key factor influencing a resolution of the electron microscope. When the voltage stability of the high-voltage system fluctuatesand a ripple voltage is too high, an electron microscope image is not clear and even an electron emission fault occurs. Therefore, high-voltage power supply system performance is a key index for evaluating the performance of the electron microscope, and a stable, reliable and high-precision high-voltage stability testing device is necessary. Meanwhile, accurate measurement is a basis of instrument maintenance and repair; when the high voltage is abnormal, an alarm is given out in time, and a fault occurring part is positioned and broadcasted; and the instrument can be reminded to be shut downin time, further damage is avoided, meanwhile, the basis can be provided for repair, and fault finding and repair are facilitated.

Description

Technical field [0001] The invention discloses a high-voltage stability measurement and early warning device of an electron microscope. Background technique [0002] Electron Microscope (EM for short), hereinafter referred to as electron microscope, with the development of science and technology, electron microscope plays an irreplaceable role in the research field, and its application is more and more extensive, playing in the fields of materials science, biological science, medicine, etc. Plays an important role. For example, a transmission electron microscope can see fine structures smaller than 0.2 μm that cannot be seen under an optical microscope. These structures are called submicroscopic structures or ultramicrostructures. The transmission electron microscope high-voltage power supply is an important part of the transmission electron microscope. It provides electron acceleration voltage for the transmission electron microscope to generate an electron beam with a single w...

AI Technical Summary

Problems solved by technology

When the voltage stability fluctuates and the ripple voltage is too large in the high-voltage system, the image of the electron microscope will be unclear or even electron emission failure will occur

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