LPCVD front-end silicon wafer transfer device
A technology of operating devices and silicon wafers, applied in transportation and packaging, electrical components, semiconductor/solid-state device manufacturing, etc., can solve problems such as low manual operation efficiency, human health impact, toxicity, etc., and achieve highly intelligent integration, The effect of improving the efficiency of feeding and discharging materials and improving the yield rate
Pending Publication Date: 2020-05-08
无锡江松科技股份有限公司
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Problems solved by technology
[0002] The handling and transportation of silicon wafers before LPCVD on the market still use the original manual handling and loading and unloading of wafers. The gas and liquid in the reaction furnace will have certain toxicity, which has a great impact on the health of personnel. operational inefficiency
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[0025] The following disclosure provides many different embodiments or examples for implementing different structures of the present invention. To simplify the disclosure of the present invention, components and arrangements of specific examples are described below. Of course, they are only examples and are not intended to limit the invention. Furthermore, the present disclosure may repeat reference numerals and / or reference letters in different instances, such repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific process and material examples are provided herein, but one of ordinary skill in the art may recognize the use of other processes and / or the use of other materials.
[0026] The handling and transportation of silicon wafers before LPCVD on the market still use the original manual handling and loading and unloading of wafers. The gas and liqui...
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The invention discloses an LPCVD front-end silicon wafer transfer device, and relates to the technical field of silicon wafer carrying. An empty basket enters the LPCVD front-end silicon wafer transfer device through a basket transfer device; then a silicon wafer basket feeding device sequentially feeds the bulk silicon wafers into an empty basket, so that the action of putting silicon wafers intothe basket is realized; when the basket is full of the silicon wafers and the next basket is not in place, a silicon wafer caching device caches the silicon wafers conveyed by the silicon wafer basket feeding device until the next empty basket is in place, meanwhile the full-load basket at the position of the silicon wafer basket is carried to the position of the wafer unloading device, and a wafer unloading device unloads the silicon wafers in the basket and moves the silicon wafers to a wafer loading device; the wafer loading device loads the silicon wafers into a silicon wafer boat; the silicon wafer boat carrying clamping jaw carries a boat fully loaded with silicon wafers and turns the boat from a horizontal position to a vertical position, and a docking feeding runway conveys the boat fully loaded with the silicon wafers to the reaction furnace, so that automatic operation of the silicon wafers is realized, manual carrying is avoided, a large amount of manpower and material resources are saved, and the silicon wafer transfer efficiency is greatly improved.
Description
technical field [0001] The invention relates to the technical field of silicon wafer handling, in particular to an LPCVD front silicon wafer running device. Background technique [0002] The handling and transportation of silicon wafers before LPCVD on the market still use the original manual handling and loading and unloading of wafers. The gas and liquid in the reaction furnace will have certain toxicity, which has a great impact on the health of personnel. Operational inefficiency. Contents of the invention [0003] In order to improve the transfer efficiency of silicon wafers, the technical solution of the present invention provides an LPCVD front-end silicon wafer operating device. The technical solution is as follows: [0004] The invention provides a silicon wafer running device in front of LPCVD, which includes a flower basket circulation device, a silicon wafer entering flower basket device, a silicon wafer buffer device, a silicon wafer flipping into buffer man...
Claims
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IPC IPC(8): H01L21/677
CPCH01L21/67742H01L21/67766
Inventor 黄文杰
Owner 无锡江松科技股份有限公司