Position calibration method and position calibration device

Abstract

The present invention provides a position calibration method, which includes acquiring the focal point coordinates of the imaging system, a height sensor scans the height of the second marking area at least twice along at least two directions, and acquires the height of each scanning path in the second The coordinates of the midpoint in the marking area, obtaining the intersection coordinates of the line connecting the midpoint of the scanning path in the same direction and the line connecting the midpoint of the scanning path in the same direction, according to the coordinates of the focus, the coordinates of the intersection and the offset coordinates, Calculating the relative position coordinates between the imaging system and the height sensor without a microscope, etc., reducing the complexity of the system, the calculation of the intersection coordinates is related to the real edge of the second marking area, including the algorithm compensation for the center position and offset, the coordinates of the intersection point are real positions with high accuracy. The present invention also provides a position marking device for realizing the position marking method.

Description

technical field [0001] The invention relates to the technical field of machine vision, in particular to a position calibration method and a position calibration device. Background technique [0002] Machine vision technology is an important direction of industrial automation technology. Auto Optical Inspection (AOI) based on machine vision technology has become the mainstream development trend instead of traditional manual visual inspection. AOI equipment is widely used in automobiles, medicine, transportation, semiconductors and other fields due to its fast and accurate defect identification and positioning capabilities. Existing AOI equipment usually includes optical imaging system, stage, material transfer system, etc. The main equipment to complete the inspection task is the imaging system. The imaging system required for high-precision detection or measurement tasks has high resolution, but this also limits the effective focal depth of the imaging system, causing the s...

AI Technical Summary

Problems solved by technology

However, additional devices such as microscopes are used to ensure that the center of the graphic mark is accurately moved to the center of the height sensor’s light spot or the center of the probe, which increases the complexity of the system, and the center position measured by observing the height sensor’s light spot or probe corresponds to the height sensor signal There will be a deviation caused by algorithm compensation between the real positions, which limits the calibration accuracy

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