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Measurement system and method

A measurement system and processing system technology, applied in the field of measurement, can solve problems such as height distribution errors, and achieve the effect of compact structure and accurate height information

Active Publication Date: 2020-06-02
SKYVERSE TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the movement error of the measuring device, the vibration of the measuring device, the vibration of the environment and other factors, the preset phase shift is not the same as the actual phase shift introduced to the reflected beam. This phase shift error will lead to the measured height distribution with a certain error

Method used

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  • Measurement system and method
  • Measurement system and method

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Embodiment Construction

[0038] Various exemplary embodiments of the present disclosure will now be described in detail with reference to the accompanying drawings. The description of the exemplary embodiments is illustrative only, and in no way restricts the disclosure, its application or uses. The present disclosure can be implemented in many different forms and is not limited to the embodiments described here. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that relative arrangements of parts and steps, compositions of materials, numerical expressions and numerical values ​​set forth in these embodiments should be interpreted as illustrative only and not as limiting, unless specifically stated otherwise.

[0039] "First", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distin...

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Abstract

The disclosure, which relates to the technical field of measurement, provides a measurement system and method. The measurement system comprises a light source which is used for generating a detectionlight beam, an objective lens configured to enable the detection light beam to irradiate a detected area of a detected object and obtain a to-be-processed light beam according to a reflected light beam from the detected area, an optical splitter configured to split the to-be-processed light beam to obtain a first light beam and a second light beam, an imaging device configured to obtain a detection image according to the first light beam, a light intensity detection device configured to obtain the intensity corresponding to the light with the preset wavelength according to the second light beam, moving equipment configured to enable the objective lens to move relative to the measured object along the optical axis direction at different moments, and a processing system configured to determine the height information of the measured area according to the intensity corresponding to the light with the preset wavelength at different moments and the detection images at different moments.

Description

technical field [0001] The present disclosure relates to the field of measurement technology, in particular to a measurement system and method. Background technique [0002] In the field of integrated circuit manufacturing, in order to improve product yield, it is necessary to measure the three-dimensional shape of the wafer to check whether the wafer manufacturing process meets the standards. The three-dimensional shape measurement method based on white light interferometry is widely used in the field of integrated circuit detection due to its characteristics of non-contact, fast and high precision. [0003] White light interferometry uses white light with a very short coherence length as the light source, and the surface topography of the measured object can be located by the peak value of the interference signal intensity. The white light phase-shift interferometry technology incorporates the phase shift of the reflected light beam reflected by the measured object while ...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 陈鲁杨乐马砚忠张威李小辉
Owner SKYVERSE TECH CO LTD
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