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Multi-frequency self-focusing micromachined ultrasound transducer

An ultrasonic transducer and micromechanical technology, applied in the direction of microstructure technology, microstructure devices, generators/motors, etc., can solve complex drive and control circuits and other problems, and achieve multi-frequency integration, avoid conditioning and control circuits Effect

Active Publication Date: 2020-06-09
江苏英特神斯科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a multi-frequency self-focusing micro-machined ultrasonic transducer to solve the problem of the manufacture of multi-frequency and high-frequency ultrasonic transducers, and the existing micro-machined ultrasonic transducers require complex drive and control circuits to make them The problem of focusing, the multi-frequency self-focusing micromachined ultrasonic transducer can realize the functions of multi-frequency integration and self-focusing

Method used

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  • Multi-frequency self-focusing micromachined ultrasound transducer
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Embodiment Construction

[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with examples. It should be understood that the specific embodiments described below are only used to explain the present invention, and are not intended to limit the present invention. The protection scope of the present invention is not limited by the specific embodiments, but determined by the claims.

[0039] Such as Figure 1-Figure 3 As shown, a self-focusing multi-frequency micromachined ultrasonic transducer of the present invention adopts a PMUT device and includes a support layer 1, a structure layer 2 and a substrate layer 3, wherein the substrate layer 3 is located on one side of the support layer 1, and the structure layer 3 is located on the other side of the support layer 1. The structural layer 3 (self-supporting layer 1) is composed of a lower electrode 5, a piezoelectric layer ...

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Abstract

The invention discloses a multi-frequency self-focusing micromachined ultrasound transducer. The micromachined ultrasound transducer comprises vibration elements with more than two kinds of frequencies, and a vibration element array is formed by the vibration elements with the same frequency; any vibration element array is composed of at least one set of vibration elements arranged in a circular ring shape, and the circular ring centers of the vibration element arrays coincide with each other; and the radius of the circular ring where any vibration element is located is determined by a formula(1). The micromachined ultrasound transducer adopts an annular array structure, and realizes multi-frequency and self-focusing functions on a single MUT device by designing the vibration elements ofthe MUT array device and the distribution of the vibration elements on the device.

Description

technical field [0001] The invention belongs to the technical field of micro-electro-mechanical systems (MEMS), and relates to an ultrasonic transducer, in particular to a multi-frequency self-focusing micro-mechanical ultrasonic transducer. Background technique [0002] The ultrasonic transducer is mainly used to transmit and receive ultrasonic waves. It is a device that converts electromagnetic energy into mechanical energy (sound energy). It is usually made of piezoelectric ceramics or other magnetostrictive materials. Common ultrasonic cleaners, ultrasonic fog Transducers, B-ultrasound probes, etc. are all application examples of ultrasonic transducers. In the medical field, the ultrasonic probe occupies an important position in various ultrasonic diagnostic equipment, and is often called the "eye" of the ultrasonic diagnostic instrument. It can convert high-frequency electrical energy into ultrasonic mechanical energy and radiate outward, and can also receive ultrasonic...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B06B1/06B81B3/00B81B7/02
CPCB06B1/0625B81B3/0021B81B7/02
Inventor 何野徐波徐方良
Owner 江苏英特神斯科技有限公司
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