Easy-to-maintain rigid-flexible coupling platform structure and multi-degree-of-freedom motion platform composed of same

Abstract

The invention discloses an easy-to-maintain rigid-flexible coupling platform structure and a multi-degree-of-freedom motion platform composed of the same. The easy-to-maintain rigid-flexible couplingplatform structure comprises a working platform, a platform frame, a detection element and a driving element device, wherein the working platform is arranged in the platform frame in a sleeved mode through a concave-convex structure and does not make contact with the platform frame, the two end faces of the platform frame and the two end faces of the working platform are fixedly connected throughat least two sets of flexible hinges; and the working platform is connected with the driving force output end of the driving element device, and the detection element at least comprises a main detection element for detecting the movement displacement or speed of the working platform and an auxiliary detection element used for detecting the deformation amount or the deformation speed of the flexible hinges. When the flexible hinges are replaced, the flexible hinges are replaced set by set, the whole working platform does not need to be disassembled, and the original assembly relation cannot bedamaged when any set of flexible hinges are independently replaced; and in addition, the plurality of sets of flexible hinges can work at the same time through combination of different thicknesses, sothat multi-rigidity adjustment is achieved, and the device adapts to different load conditions.

Description

technical field [0001] The invention relates to a rigid-flexible coupling platform, in particular to an easy-maintenance rigid-flexible coupling platform and a multi-degree-of-freedom motion platform composed thereof. Background technique [0002] Large-stroke high-precision motion platforms are widely used in semiconductor packaging and other fields. In order to comprehensively take into account the requirements of both large stroke and high precision, the macro-micro composite motion platform is widely used in the design of the above-mentioned large stroke high-precision motion platform. In a typical macro-micro compound motion platform, the flexible hinge can effectively solve the friction dead zone problem, and has the advantage of greatly improving the positioning accuracy without increasing the cost. Therefore, the working platform often adopts a flexible hinge-based design. Program. [0003] The patent No. CN201811524858.2 discloses a rigid-flexible coupling platfor...

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Problems solved by technology

[0003] The patent No. CN201811524858.2 discloses a rigid-flexible coupling platform and motion platform with intermediate stiffness adjustment, and the patent No. CN201811524858.2 discloses a rigid-flexible coupling platform and motion platform with stiffness adjustment on both sides. The two patents The design of the spring (flexible hinge) in the technical solution is not easy to maintain. To replace the spring, the entire working platform needs to be dismantled and reassembled. If different rigidities need to be adjusted, multiple sets of splints with different gaps need to be prepared to adapt to different The thickness of the spring leaf is complicated to replace

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