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Reflection angle error correction algorithm based on inclined illumination reflection type PIE optical system

A technology of error correction and oblique lighting, applied in optics, optical components, instruments, etc., can solve the problems of small operation range and slow speed, achieve high accuracy, improve operation accuracy and function search ability

Inactive Publication Date: 2020-06-19
NANJING UNIV OF SCI & TECH
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Problems solved by technology

[0008] The purpose of the present invention is to provide a reflection angle error correction algorithm based on the oblique illumination reflective PIE optical system, which overcomes the shortcomings of the existing algorithm such as small operation range and slow speed

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  • Reflection angle error correction algorithm based on inclined illumination reflection type PIE optical system
  • Reflection angle error correction algorithm based on inclined illumination reflection type PIE optical system
  • Reflection angle error correction algorithm based on inclined illumination reflection type PIE optical system

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Embodiment 1

[0057] combine figure 1 with figure 2 , a reflection angle error correction algorithm based on oblique illumination reflective PIE optical system, the steps are as follows:

[0058] Step 1: Construct a theoretical model of reflection angle error to obtain the restored image amplitude:

[0059] In order to analyze the influence of reflection angle on the image restoration results, a reflection angle error model is established according to the tilt angle spectrum transmission theory. Set β as the error coefficient, θ as the actual reflection angle, and the amplitude of the restored image obtained on the reflection plane during the image restoration process is:

[0060]

[0061] In the expansion formula, fft means Fourier transform, ifft means inverse Fourier transform, Respectively represent the horizontal and vertical coordinates of the reflection plane in the frequency domain, d represents the distance between the sample plane and the reflection plane, Restoring the ...

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Abstract

The invention discloses a reflection angle error correction algorithm based on an inclined illumination reflection type PIE optical system, and the algorithm comprises the steps: firstly building a reflection angle error theoretical model to acquire the amplitude of a restored image; and solving the optimal reflection angle based on an image restoration error evaluation function. An image restoration error evaluation function is a root mean square (MSE) function, an extreme point of the MSE function is searched by updating a reflection angle value, a reflection angle corresponding to the extreme point is an optimal reflection angle, and a high-quality imaging result can be obtained by substituting the reflection angle into a reflection type PIE imaging process. The reflection angle error source nature is analyzed through modeling, and the accuracy and effectiveness of the correction result are enhanced; and meanwhile, the reflection angle searching direction can be quickly judged, andthe invention has the advantages of unbiased property, unimodality, high sensitivity and the like.

Description

technical field [0001] The error calculation technology specifically relates to a reflection angle error correction algorithm based on an oblique illumination reflective overlapping diffractive (PIE) optical system. Background technique [0002] In the traditional transmission PIE imaging technology, there are mainly two kinds of errors: scanning position error and axial distance error. The scanning position error is caused by a certain deviation between the actual displacement of the X-Y translation stage and the set displacement each time, and the axial distance error is caused by the inability to accurately measure the distance between the sample and the CCD target surface . The existence of these two errors will have a certain impact on the experimental results. In the reflective PIE imaging technology, in addition to the scanning position error and the axial distance error, there is also a reflection angle error, that is, there is an error in the rotation angle of the...

Claims

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Application Information

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IPC IPC(8): G02B27/00
CPCG02B27/0012
Inventor 陈洪权高瑞黄帅铭袁群毕津慈
Owner NANJING UNIV OF SCI & TECH
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