Gas pipeline system and semiconductor device
A gas pipeline and gas technology, applied in the pipeline system, gas/liquid distribution and storage, mechanical equipment, etc., can solve the problems of poor visibility and high cost, improve visibility, reduce detection costs, and avoid polluted effect
Inactive Publication Date: 2020-06-23
XIA TAI XIN SEMICON QING DAO LTD
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Problems solved by technology
At present, electrochemical gas sensors are often used to detect gas leakage, which has poor visibility and high cost
Method used
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[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0031] It should be noted that when an element or component is considered to be “connected” to another element or component, it may be directly connected to the other element or component or there may be an intervening element or component at the same time. When an element or component is referred to as being "disposed on" another element or component, it can be directly disposed on the other element or component or intervening elements or compone...
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A gas pipeline system for discharging and / or supplying specific gas to a chamber. The gas pipeline system includes at least two pipeline sections and a pump arranged on the pipeline. The gas pipelinesystem also includes a bellows, a housing, and a gas detection device provided with test paper, the bellows connects the two pipeline sections, the housing surrounds the bellows, the gas detection device is set in the housing and located on one side of the bellows, and the test paper is kept moist inside the gas detection device. When there is specific gas leakage into the housing, the test paperchanges color according to the pH of the specific gas, and the color change is observed as the detection result. The gas pipeline system of the present invention uses the test paper to detect the specific gas leakage, improves the visibility of the detection result, enables the operator to grasp the leakage situation in time, avoids equipment contamination and harm to the operator's body, and reduces the detection cost. The invention also provides a semiconductor device, which includes a communicating chamber and a gas pipeline system.
Description
[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Provisional Patent Application No. 62 / 780,372, filed December 17, 2018, the entire contents of which are incorporated herein by reference. technical field [0003] The invention relates to the field of semiconductor processing, in particular to a gas pipeline system and semiconductor equipment. Background technique [0004] During the processing of semiconductors, it is often necessary to use various gases. Some of these gases are dangerous, such as ammonia (NH 3 ) is flammable, and if it leaks, it may damage the equipment, and may cause accidents such as fire and explosion; for example, phosphine (PH 3 ) is highly toxic, and it may affect the heart, respiratory system, kidney, gastrointestinal tract, nervous system and liver after workers inhale it, endangering the health of workers. Moreover, the gas leaks into the equipment, which will contaminate the product, resulting in...
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IPC IPC(8): F17D5/02
CPCF17D5/02
Inventor 朱灿述金志勋徐康元
Owner XIA TAI XIN SEMICON QING DAO LTD