A Highly Sensitive Vibration Sensor
A vibration sensor, high-sensitivity technology, used in instruments, measuring devices, electrical devices, etc., can solve the problems of limited response to vibration signals, small output electrical signals of sensors, and low sensitivity, and achieves increase in polarized charge, increase Sensitivity, the effect of enlarging transverse stress
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[0024] The preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, so as to define the protection scope of the present invention more clearly.
[0025] The present invention uses a sealing cap with a groove, and the groove edge of the sealing cap is connected with the free end of the piezoelectric cantilever beam, so that the load in the vertical direction generated by the vibration signal is concentrated on the free end of the piezoelectric cantilever beam, which will make the piezoelectric cantilever The greater the bending moment on the beam, the greater the deflection of the piezoelectric cantilever beam. This structure can effectively expand the lateral stress on the piezoelectric film on the piezoelectric cantilever beam and increase the polarization charge generated on the upper and ...
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