Method and device for measuring laser far-field divergence angle

Abstract

The invention relates to a method and device for measuring a far-field divergence angle of a laser, and the method comprises the steps: S1, an X axis, a Y axis and a Z axis are determined, a measurement plane is formed through X and Z, the laser is set at an original point of the measurement plane, and a light-sensitive surface of a detector faces a light-emitting surface of the laser; S2, the detector rotates around the Y axis, the light intensity of the laser is detected, the diameter of a light spot is obtained, and the far-field divergence angle perpendicular to the junction plane or parallel to the junction plane is calculated; S3, the laser is rotated by 90 degrees, the detector rotates around the Y axis, the intensity of light emitted by the laser is detected, the diameter of a light spot is obtained, and the far-field divergence angle parallel to the junction plane or perpendicular to the junction plane is calculated; and a vertical divergence angle and a horizontal divergenceangle of the laser is obtained. By rotating the laser by 90 degrees, the detector in the same direction is used for detecting a horizontal divergence angle and a vertical divergence angle, light intensity measurement and far-field divergence angle parameter test in different directions are completed, the test scheme is simplified, and the test speed and stability are improved.

Description

technical field [0001] The invention relates to the detection of laser parameters, in particular to a method and device for measuring the far-field divergence angle of the laser. Background technique [0002] For semiconductor lasers, especially edge-emitting laser chips, the light-emitting area of ​​the chip is rectangular, and the far-field spot corresponding to the emitted laser light is generally elliptical. One of the parameters for evaluating far-field flare is the far-field divergence angle. Among them, the divergence angle perpendicular to the junction plane of the light-emitting region is the vertical divergence angle, and the divergence angle parallel to the junction plane of the light-emitting region is the horizontal divergence angle; The size affects the packaging process and light extraction efficiency of the pump laser. Therefore, it is very important to quickly and effectively evaluate the far-field divergence angle of the laser source. [0003] At present...

AI Technical Summary

Problems solved by technology

[0003] At present, the conventional detection method on the market is to first fix the laser, and then use the detector to detect the light intensity in the measurement plane parallel to the junction plane and perpendicular to the junction plane to obtain the far-field divergence angle of the laser light source. The method needs to be measured on two planes separately, and two mutually perpendicular measurement planes need to be set, resulting in reduced measurement stability and slower measurement speed

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