Silicon wafer conveying equipment on sputtering table and using method

Abstract

The invention discloses silicon wafer conveying equipment on a sputtering table, and relates to the technical field of silicon wafer processing. According to the silicon wafer conveying equipment on the sputtering table, a machine body is arranged on a plane, conveying wheels are arranged in the machine body, and the conveying wheels are fixedly connected with the machine body; a placing device isarranged on one side of the machine body, is connected with the machine body, and comprises a shell arranged above the machine body, the shell is connected with the machine body in a matched manner,and the interior of the shell is hollow; placing plates are arranged in the shell, and a gap is formed between the placing plates; the guide-out device is arranged in the machine body, is fixedly connected with the machine body, and comprises a guide-out plate arranged in the machine body, the guide-out plate is matched with the gap of the placing plate, and the guide-out plate can be inserted into the gap of the placing plate; and a driving device is arranged in the machine body. The silicon wafer conveying device is used for solving the problem that in the prior art, silicon wafers collide with a conveying device in the conveying process, the silicon wafers are damaged easily, and the silicon wafer machining efficiency cannot be effectively improved.

Description

technical field [0001] The invention relates to the technical field of silicon wafer processing, in particular to a silicon wafer conveying device on a sputtering table and a method for using it. Background technique [0002] At present, solar energy has become a relatively widely used renewable energy source for human beings, and solar cells are the main tool for utilizing solar energy, and their function is to directly convert solar energy into electrical energy. [0003] The conversion efficiency of a solar cell is the ratio of the power generated by the cell to the incident light power. Silicon wafers are the main material of solar cells. In order to improve the conversion efficiency of solar cells, silicon wafers need to be processed or processed in multiple steps. [0004] During the production process of solar silicon wafers, silicon wafers are usually stored in silicon wafer racks, and taken out one by one during production to cooperate with the subsequent productio...

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Problems solved by technology

[0005] The object of the present invention is to provide a silicon wafer conveying device on a sputtering table, which is used to solve the problem in the prior art that the silicon wafer will collide with the conveying device during the conveying process, which may easily cause damage to the silicon wafer and cannot effectively improve the processing efficiency of the silicon wafer. question

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