Smart cloud clean room control method and system
A control method and clean room technology, applied in the field of clean room, can solve the problems of long data acquisition period, inaccurate real-time monitoring, large dynamic control deviation, etc., to improve the accuracy of real-time environmental monitoring, control deviation quickly and smoothly, reduce The effect of small control deviations
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[0027] The present invention will be further described below in conjunction with specific embodiment:
[0028] A smart cloud clean room control method, comprising the following steps:
[0029] System initialization, the data acquisition module collects environmental data in the clean room;
[0030] The central processing module separates each type of working environment data segment corresponding to the clean room into n equal parts, records the offset value corresponding to each equal point to form a data set and pre-stores it, and collects correspondingly according to the pre-stored different environmental data collection nodes The data collection of node bias, query the bias required by the acquisition node under the current environmental data, and output the corresponding bias current, the central processing module collects the power of each current environmental data acquisition node in real time, and compares with the corresponding environmental data acquisition node Co...
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