Method, device, control method and control device for disintegrating consolidated and deposited fine particles
A control method, fine particle technology
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[0063]The present invention will be described below based on examples, but it should be noted that the present invention is not limited to these examples. In the following detailed description of the invention, some specific details are set forth in detail. However, the present invention can be fully understood by those skilled in the art about the parts that are not described in detail.
[0064] In addition, those of ordinary skill in the art should understand that the provided drawings are only for illustrating the objects, features and advantages of the present invention, and the drawings are not actually drawn to scale.
[0065] At the same time, unless the context clearly requires, the words "include", "include" and other similar words in the entire specification and claims should be interpreted as an inclusive meaning rather than an exclusive or exhaustive meaning; that is, "include but not limited to the meaning of ".
[0066] The method for dissolving the consolidate...
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