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Mask plate and manufacturing method thereof

A manufacturing method and mask technology, which are applied in semiconductor/solid-state device manufacturing, ion implantation plating, coating, etc., can solve problems such as mask boundary offset, and achieve the effect of avoiding offset and improving yield.

Active Publication Date: 2020-08-07
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present application provides a mask and its manufacturing method to solve the technical problem of boundary offset of the mask in the evaporation process of special-shaped screens

Method used

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  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof
  • Mask plate and manufacturing method thereof

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Embodiment Construction

[0055] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0056]In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the ap...

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Abstract

The invention provides a mask plate and a manufacturing method thereof. The mask plate comprises an outer frame and a shading component which is in a hollow area of the outer frame and comprises firstshading strips and second shading strips which divide the hollow area into a plurality of first areas; any first shading strip comprises a plurality of first sub shading strips which are repeatedly arranged, one first sub shading strip corresponds to one first area, and the first sub shading strip is located between two adjacent first areas in the first direction; the first sub shading strip comprises a first protruding part covering part of the first areas. According to the invention, the plurality of first sub shading strips and the plurality of second sub shading strips are arranged on thefirst shading strips and the second shading strips which are staggered transversely and longitudinally; therefore, the first sub shading strip corresponding to any first area is located at the corresponding level, the deviation of the first sub shading strips and the second sub shading strips caused by the stretching of the shading strips is avoided, and the yield of products is increased.

Description

technical field [0001] This application relates to the display field, in particular to a mask and a manufacturing method thereof. Background technique [0002] In the manufacturing process of an organic light emitting diode (Organic Light Emitting Diode, OLED) display panel, the organic light emitting layer of the OLED device in the OLED display panel is usually formed by an evaporation process. When using the evaporation process to manufacture the film layer in the display panel, the mask plate with the pattern corresponding to the film layer is usually attached to the side to be evaporated on the substrate of the display panel, and placed above the evaporation source, and the evaporation The evaporation material in the source is heated to form a vapor that spreads to the substrate and is deposited on the substrate to form a film layer on the substrate. [0003] Existing special-shaped screens usually include rounded corners or grooves on the sides, so it is necessary to u...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/32H01L51/56H01L51/00C23C14/04H10K99/00
CPCC23C14/042H10K59/353H10K71/166H10K71/00
Inventor 林治明
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD