Surface plasmon polariton humidity sensor
A surface plasmon and humidity sensor technology, applied in instruments, scientific instruments, measuring devices, etc., can solve the problem of low detection sensitivity and achieve high humidity detection sensitivity and good application prospects
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Embodiment 1
[0021] The invention provides a surface plasmon humidity sensor, such as figure 1 As shown, the humidity sensor includes a substrate 1 , a groove 2 , a noble metal film 3 , and a moisture-sensitive material part 4 . The groove 2 is provided on the substrate 1 , that is to say, the surface of the substrate 1 has the groove 2 . Grooves 2 are arranged in parallel. The material of the substrate 1 is silicon, which is convenient for integration in conventional circuits; if the device is not used for integration, the material of the substrate 1 can also be other materials such as silicon dioxide. The grooves 2 are arranged periodically, that is to say, the grooves 2 are arranged periodically in parallel. The period between the grooves 2 is related to the wavelength range of the light source used in the device, and the wavelength range of the light source should cover the resonant wavelength of the device. Noble metal film 3 is provided on the surface of substrate 1 and groove 2 ....
Embodiment 2
[0026] On the basis of Example 1, such as figure 2 As shown, the moisture-sensitive material part 4 protrudes from the noble metal film 3 on the side of the groove 2 to form a protruding part. That is to say, the moisture-sensitive material portion 4 protrudes from the surface of the substrate 1 to form a suspended state. When the moisture-sensitive material part 4 absorbs moisture, its own weight increases, causing the protruding part to bend. Compared with when no moisture is absorbed, the protruding part bends toward the surface of the substrate 1, causing the protruding part to be close to the surface of the substrate 1, thereby changing the resonance wavelength corresponding to the noble metal film 3 on the top of the substrate 1 more, and improving the Sensitivity of humidity detection.
[0027] The present invention uses carbon nanotubes as the humidity sensitive material part 4 not only because carbon nanotubes have good water absorption, but also because carbon nan...
Embodiment 3
[0031] On the basis of Example 2, such as image 3 As shown, the thickness of the head of the protrusion is greater than the thickness of the bottom of the protrusion. That is, in image 3 Among them, the upper part of the protruding part is thick and the lower part is thin. Such a design can form a "top-heavy" effect, when the moisture-sensitive material part 4 absorbs moisture, the head of the protruding part absorbs more moisture, and the weight increases more, causing the protruding part to bend more, resulting in the top of the substrate 1 The resonance wavelength corresponding to the noble metal film 3 shifts more, thereby improving the sensitivity of humidity detection.
[0032] Furthermore, the thickness of the noble metal film 3 is greater than 100 nanometers. In order to facilitate the formation of surface plasmon polaritons resonating along the surface of the noble metal film 3 , the resonance is more sensitive to the dielectric environment on the surface of the ...
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Abstract
Description
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