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Capacitance type humidity sensor capable of adjusting action area

A humidity sensor and regulation technology, applied in material capacitors, instruments, scientific instruments, etc., can solve the problems of limiting humidity detection sensitivity, unable to meet high-sensitivity humidity detection, etc., and achieve the effect of high humidity detection sensitivity

Inactive Publication Date: 2020-09-22
金华伏安光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, traditional capacitive humidity sensors often only change a physical quantity or factor that affects capacitance, which limits the sensitivity of humidity detection and cannot meet the needs of high-sensitivity humidity detection.

Method used

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  • Capacitance type humidity sensor capable of adjusting action area
  • Capacitance type humidity sensor capable of adjusting action area

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] The invention provides a capacitive humidity sensor with an adjustable action area. Such as figure 1 As shown, the humidity sensor includes a substrate 1 , a bottom metal plate 2 , a first fixing part 3 , a humidity-sensitive material part 4 , a second fixing part 5 and a top metal plate 6 . The first fixing part 3, the bottom metal plate 2 and the moisture sensitive material part 4 are placed on the substrate. The bottom metal plate 2 is arranged between the first fixing part 3 and the moisture sensitive material part 4 . The substrate 1 is an insulating material, such as silicon dioxide material. The bottom metal plate 2 is not in contact with the moisture-sensitive material portion 4 , preventing the bottom metal plate 2 from being electrically connected to the moisture-sensitive material portion 4 . The second fixing part 5 is placed on the moisture sensitive material part 4 . The top metal plate 6 is fixed between the first fixing portion 3 and the second fixin...

Embodiment 2

[0025] On the basis of Example 1, such as figure 2 As shown, the second fixing part 5 is an insulating elastic material. A cladding layer 7 is provided outside the second fixing portion 5 . The cladding layer 7 is not in contact with the top metal plate 6, preventing electrical connection between the two. The material of the cladding layer 7 is polyimide material. The polyimide material covers the elastic second fixing part 5. When the polyimide material absorbs moisture and expands, the second fixing part 5 is driven to expand, so that the hygroscopic material part 4 and the second fixing part 5 The combination expands more, so that the top metal plate 6 tilts or bends more, and the charge distribution on the top metal plate 6 and the bottom metal plate 2 changes more, thereby changing the relationship between the top metal plate 6 and the bottom metal plate 2 more. The capacitance between them, that is, making the capacitance smaller and more, ultimately improving the se...

Embodiment 3

[0027] On the basis of Embodiment 2, a polyimide material is provided in the first fixing part 3 . The polyimide material is arranged in the middle of the first fixing part 3 . The polyimide material is not in contact with the bottom metal plate 2 and the top metal plate 6, preventing electrical connection therebetween. In this way, when the humidity sensor in the present invention is placed in the environment to be measured, the first fixing part 3 comprising polyimide material will also absorb moisture and expand, so that the top metal plate 6 will also be far away from the bottom metal plate 2, It will also cause the capacitance between the top metal plate 6 and the bottom metal plate 2 to become smaller, so this design will make the capacitance between the top metal plate 6 and the bottom metal plate 2 smaller, thereby improving the sensitivity of humidity detection.

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PUM

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Abstract

The invention provides a capacitance type humidity sensor capable of adjusting an action area. A first fixing part, a bottom metal flat plate and a humidity-sensitive material part are arranged on a substrate, the bottom metal flat plate is not in contact with the humidity-sensitive material part, a second fixing part is arranged on the humidity-sensitive material part, the top metal flat plate isfixed between the first fixing part and the second fixing part, and the top metal flat plate and the bottom metal flat plate are aligned and separated. During application, the humidity-sensitive material part absorbs moisture and expands so that the top metal flat plate inclines or bends relative to the bottom metal flat plate, the capacitance between the top metal flat plate and the bottom metalflat plate is changed, and humidity detection is realized through the change of the capacitance. When the humidity is increased, the distance between the two polar plates of the capacitor is changed,the opposite area between the two polar plates of the capacitor is changed, and thus the humidity sensor has the advantage of being high in humidity detection sensitivity.

Description

technical field [0001] The invention relates to the field of humidity sensing, in particular to a capacitive humidity sensor with an adjusting action area. Background technique [0002] Humidity sensors are widely used in medical, military, meteorological, agricultural, industrial and many other fields. Existing humidity sensors mainly include resistive, piezoelectric, capacitive, optical and other humidity sensor types. Because the capacitive humidity sensor has the advantages of low manufacturing cost, short dynamic response time, and small heat loss, the capacitive humidity sensor is the most widely used in practical applications. However, traditional capacitive humidity sensors often only change a physical quantity or factor that affects capacitance, which limits the sensitivity of humidity detection and cannot meet the needs of high-sensitivity humidity detection. Contents of the invention [0003] In order to solve the above problems, the present invention provides...

Claims

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Application Information

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IPC IPC(8): G01N27/22
CPCG01N27/223
Inventor 不公告发明人
Owner 金华伏安光电科技有限公司