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Horizontally-arranged high-sensitivity humidity detection device

A humidity detection and level technology, which is applied in measuring devices, instruments, and material analysis through electromagnetic means, can solve the problem of low sensitivity and achieve the effect of enhanced absorption

Inactive Publication Date: 2022-01-14
刘翡琼
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing technology is mainly based on resistance changes, and the sensitivity to humidity detection is low

Method used

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  • Horizontally-arranged high-sensitivity humidity detection device
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  • Horizontally-arranged high-sensitivity humidity detection device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] The invention provides a horizontally arranged high-sensitivity humidity detection device. Such as figure 1 As shown, the horizontally arranged high-sensitivity humidity detection device includes a substrate layer 1 , a first conductive portion 2 , a second conductive portion 3 , a photosensitive semiconductor portion 4 , a first electrode 5 , and a second electrode 6 . The material of the first electrode 5 and the second electrode 6 is gold, silver or copper. The material of the substrate layer 1 is an insulating material. Specifically, in this embodiment, the material of the substrate layer 1 may be silicon dioxide or quartz. The work function of the first conductive portion 2 is high. Specifically, the material of the first conductive portion 2 is any one of Pt, Au, Ti, and Ta. The work function of the second conductive portion 3 is low. Specifically, the material of the second conductive portion 3 is any one of ITO, FTO, and GZO. Under light irradiation, the c...

Embodiment 2

[0025] On the basis of Example 1, such as figure 2 As mentioned above, the hole 7 runs through the photosensitive semiconductor portion 4 . When the hole 7 runs through the photosensitive semiconductor part 4, the depth of the hole 7 does not need to be accurately controlled during the preparation process, and the preparation process is simple.

Embodiment 3

[0027] On the basis of Embodiment 1, the hole 7 is tapered. The axis of the taper is along the normal direction of the surface of the photosensitive semiconductor portion 4 , and the apex of the taper is on the lower surface of the photosensitive semiconductor portion 4 . Because the cone has sloped sides, the cone absorbs more of the incoming light. When the amount of water vapor in the hole 7 changes, the electrons in the valence band of the photosensitive semiconductor part 4 are transformed into more free electrons, thereby improving the sensitivity of humidity detection.

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Abstract

The invention relates to the technical field of humidity detection devices, in particular to a horizontally-arranged high-sensitivity humidity detection device. The first conductive part, the photosensitive semiconductor part and the second conductive part are arranged on the substrate layer, the first conductive part and the second conductive part are arranged on the two sides of the photosensitive semiconductor part and fixedly connected with the photosensitive semiconductor part, a hole is formed in the photosensitive semiconductor part, and the first electrode and the second electrode are arranged on the first conductive part and the second conductive part respectively. The holes not only enhance the absorption of incident light by the photosensitive semiconductor part, but also enable water vapor to change the conductive characteristics of the photosensitive semiconductor part more and deeper. Therefore, the humidity sensor has the advantage of high humidity detection sensitivity, and has a good application prospect in the field of humidity detection.

Description

technical field [0001] The invention relates to the technical field of humidity detection devices, in particular to a horizontally arranged high-sensitivity humidity detection device. Background technique [0002] Environmental humidity detection has important applications in the normal operation of instruments and meters, and the monitoring of chemical reaction processes. In these applications, it is often not necessary to detect humidity with a wide range, but to achieve high-sensitivity detection within a certain humidity range. The existing technology is mainly based on resistance change, and the sensitivity to humidity detection is low. Contents of the invention [0003] In order to solve the above problems, the present invention provides a horizontally arranged high-sensitivity humidity detection device, including a substrate layer, a first conductive part, a second conductive part, a photosensitive semiconductor part, a first electrode, and a second electrode; the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/121G01N27/125
Inventor 刘翡琼
Owner 刘翡琼