Laser direct imaging optical system

Abstract

The invention provides a laser direct imaging optical system, which comprises: laser light source lighting equipment; digital micro-mirror device equipment arranged above the laser light source lighting equipment; a photoetching imaging lens arranged below the digital micro-mirror device equipment, wherein the photoetching imaging lens comprises a beam splitter prism, and the beam splitter prism can split laser into P laser and S laser; and laser energy tracking equioment, wherein the laser energy tracking equipment is arranged to face the photoetching imaging lens, receives the S laser, tracks the energy of the S laser and generates an adjusting signal based on the tracked energy of the S laser, and the laser light source lighting equipment performs adjustment based on the adjusting signal. According to the laser direct imaging optical system, the energy change of the laser can be automatically tracked and adjusted in time, and the stability of the laser energy is improved.

Description

technical field [0001] The invention relates to the field of laser direct imaging, in particular to a laser direct imaging optical system. Background technique [0002] During the use of the laser direct imaging optical system, the laser inevitably has the problem of energy change (energy attenuation and energy distribution). During the photolithography process of the optical system, the product (including photoresist) is very sensitive to energy fluctuations. , It is easy to lead to product scrapping and waste of cost. Contents of the invention [0003] In view of this, the present invention provides a laser direct imaging optical system, which can automatically and accurately track the energy change of the laser in time, and adjust it in time to improve the stability of the laser energy and improve the product yield. [0004] In order to solve the above technical problems, the present invention provides a laser, including: [0005] Laser light source lighting equipment...

AI Technical Summary

Problems solved by technology

[0002] During the use of the laser direct imaging optical system, the laser inevitably has the problem of energy change (energy attenuation and energy distribution). During the photolithography process of the optical system, the product (including photoresist) is very sensitive to energy fluctuations. , it is easy to lead to product scrapping and waste of cost

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