A mems micropump diaphragm life testing device and testing method thereof

Abstract

The invention relates to a MEMS micropump diaphragm life test device and a test method thereof, comprising a pressure accumulator container, a sensor interface is arranged on the top, a valve interface and a pump interface are arranged on the side, and a four-way pipeline is arranged inside; the three-way pipeline of the four-way pipeline The first nozzle is respectively connected with the sensor interface, the valve interface and the pump interface, and the fourth nozzle penetrates downward through the pressure accumulation container; the bottom surface of the pressure accumulation container at the fourth nozzle is attached to a diaphragm, and the diaphragm is driven to vibrate by the piezoelectric sheet; The sensor interface is connected to the pressure sensor, the valve interface is connected to the pressure relief branch and the solenoid valve, and the pump interface is connected to the replenishment branch and the replenishment pump. The liquid with a preset pressure value is added to the road, and the piezoelectric film drives the diaphragm to vibrate for a preset number of times under the preset pressure to complete the life test; the invention is simple and compact, easy to use, and realizes the life test of the micropump diaphragm. The test cycle and test cost are greatly reduced.

Description

technical field [0001] The invention relates to the field of technical diaphragm test devices, in particular to a MEMS micropump diaphragm life test device and a test method thereof. Background technique [0002] In the existing technology, the processing technology of MEMS micropump is complicated, the processing precision is high, the sample trial production cycle is long, and the processing cost is high; the diaphragm is the core part of the MEMS micropump, and the life of the diaphragm is decisive for the life of the MEMS micropump. Therefore, it is often necessary to install MEMS micropumps equipped with diaphragms of different thicknesses and shapes, and conduct life tests on MEMS micropumps to verify the rationality of the design parameters and working parameters of the corresponding MEMS micropump diaphragms. However, after the MEMS micropump is manufactured, it is not easy to disassemble, the installation and test efficiency is low, and the diaphragm will be damaged...

AI Technical Summary

Problems solved by technology

[0002] In the existing technology, the processing technology of MEMS micropump is complicated, the processing precision is high, the sample trial production cycle is long, and the processing cost is high; the diaphragm is the core part of the MEMS micropump, and the life of the diaphragm is decisive for the life of the MEMS micropump. Therefore, it is often necessary to install MEMS micropumps equipped with diaphragms of different thicknesses and shapes, and conduct life tests on MEMS micropumps to verify the rationality of the corresponding MEMS micropump diaphragm design parameters and working parameters

However, it is not easy to disassemble the MEMS micropump after it is manufactured, the installation and testing efficiency is low, and the diaphragm will be damaged during the installation process, which greatly affects the progress of the testing work

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