Mask and evaporation device

A technology of mask plate and evaporation, which is applied in the field of mask plate, can solve the problems of affecting the display effect of OLED panel and uneven brightness of display panel

Pending Publication Date: 2020-10-30
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When the wrinkled metal mask is used for evaporation, when the OLED panel is lit, there will be local Mura (Mura refers to the phenomenon that the brightness of the display panel is uneven, causing various traces) or obvious stripes, which will affect the display effect of the OLED panel.

Method used

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  • Mask and evaporation device
  • Mask and evaporation device
  • Mask and evaporation device

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Embodiment Construction

[0039] Features and exemplary embodiments of various aspects of the invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention. In the drawings and the following description, at least some well-known structures and techniques have not been shown in order to avoid unnecessarily obscuring the present invention; and, for clarity, the dimensions of some structures may have been exaggerated. Furthermore, the features, structures, or characteristics described hereinafter may be combined in any suitable manner in one or more embodiments.

[0040] The orient...

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Abstract

The embodiment of the invention provides a mask and an evaporation device. The mask comprises a mask body and tensile expansion parts, wherein the mask body comprise a pattern evaporation area, and aplurality of evaporation openings are formed in the pattern evaporation area; and the tensile expansion parts are distributed on the peripheral side of the pattern evaporation area, a deformation direction of the tensile expansion parts is opposite to a deformation direction of the mask body in the direction perpendicular to a tensile stress direction, and interaction force exists between the tensile expansion parts and the mask body. According to the mask, by arranging the tensile expansion parts, wrinkles are prevented from being formed in a net stretching process, the relative position precision when the mask is attached to a display substrate is improved, local Mura and obvious stripes are prevented from occurring when a display panel is lightened after evaporation, and the display effect is improved.

Description

technical field [0001] The invention relates to the technical field of mask plates, in particular to a mask plate and an evaporation device. Background technique [0002] In the prior art, OLED (Organic Light-Emitting Diode) panels have the advantages of self-illumination, fast response, higher contrast, and ultra-thin and rollable. Therefore, OLED panels are increasingly used in products with display devices such as mobile phones. , Wearable products. [0003] At present, when preparing an OLED panel, a mask plate is often used to vapor-deposit the material to a designated position of the display substrate during the evaporation process. In the evaporation process, the mask plate needs to be stretched. During the stretching process, the mask plate is stretched on both sides, so that the mask plate shrinks and deforms perpendicular to the stretching direction, resulting in extrusion instability. , so that the mask produces wrinkles perpendicular to the stretching direction...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 付佳李金库李文星范柳彬刘玉轩姜正文
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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