A device and method for online measurement of five-degree-of-freedom motion error of a guide rail

Abstract

The invention belongs to the field of precision mechanical error measurement, and discloses an online measurement device and method for a five-degree-of-freedom motion error of a guide rail. The device is composed of five eddy current displacement sensors embedded in a certain regular arrangement on the moving platform. The eddy current sensors measure the displacement changes of different positions of the guide rail relative to the reference line during the movement process. The present invention adopts a plane with general precision as the measurement reference, and eliminates the influence of the measurement reference plane on the measurement of the five-degree-of-freedom error of the guide rail, thereby realizing high-precision, real-time, and non-contact measurement of the five-degree-of-freedom error of the guide rail, and solving the problem of single-parameter measurement The problem that the device cannot be measured online, and the measurement system has strong anti-interference ability, can realize stable measurement in actual working conditions. In the actual measurement of the five-degree-of-freedom error of the guide rail, the influence of the benchmark on the error measurement of the guide rail is considered and reduced.

Description

technical field [0001] The invention belongs to the field of precision mechanical error measurement, and in particular relates to an online measurement device and method for five-degree-of-freedom motion error of a guide rail. Background technique [0002] When the guide rail kinematic pair moves along the linear guide rail, there are positioning errors along the direction of the guide rail, two-dimensional straightness errors (horizontal straightness errors, vertical straightness errors) perpendicular to the direction of the guide rails, two-dimensional angle errors (pitch angle errors, Yaw angle error), roll angle error six degrees of freedom error. The motion error of the guide rail is generally measured by offline method, but when the manufacturing equipment is in the process of processing, due to the influence of cutting force, etc., the motion error will be different from the measurement result obtained by the offline measurement method, so real-time, fast and accurate...

AI Technical Summary

Problems solved by technology

At present, devices such as level gauges, laser interferometers, and collimators can only measure single-parameter or two-degree-of-freedom errors, and multiple measurements are required to measure the multi-degree-of-freedom errors of the guide rail. This is an offline measurement and cannot be realized online. ,Time-consuming

The guide rail multi-degree-of-freedom motion error measurement device developed by Renishaw and other companies can measure the guide rail multi-degree-of-freedom motion error at one time. It has the characteristics of fast measurement speed, but it is also an offline measurement method.

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