Component for film formation apparatus and film formation apparatus provided with component for film formation apparatus
A film-forming device and component technology, which is applied in the field of film-forming devices, can solve the problems of sputtering film peeling and falling off, polluting the film-forming chamber, etc.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0047] In Example 1, a substrate made of SUS304 with a planar size of 80 mm×100 mm and a thickness of 2 mm was used, and the sprayed film 3 (thickness: 350 μm) composed of Al alone was formed on its surface by arc spraying. In order to obtain the anchoring effect, dry sandblasting is performed on the surface of the SUS304 substrate before forming the sprayed film to make the surface rough. As the spraying method, an arc spraying method was performed. Four different samples (Al-1, Al-2, Al-3, Al-4) under the conditions shown in Table 1 described later were produced.
[0048] In addition, unlike the above-mentioned samples, a sprayed coating composed of an Al alloy whose additive element is Si or Ti was also prepared. At this time, the Si content is in the range of 4.81 to 11.6 at % (atomic %), and the Ti content is in the range of 1.1 to 2.9 at %.
Embodiment 2
[0052] In Example 2, the same substrate as in Example 1 was used, and the sprayed film 3 (thickness: 350 μm) made of a Cu—Al alloy was formed on the surface by arc spraying. The composition of the Cu-Al alloy is Cu-7.9% by mass Al. In the same manner as in Example 1, in order to obtain an anchoring effect, dry blasting was performed on the surface of the substrate before forming the sprayed film. Thereby, the surface of the base material is roughened. As the spraying method, an arc spraying method was performed. Two different samples (Cu-Al-1, Cu-Al-2) of the spraying conditions shown in Table 1 mentioned later were produced.
[0053] In addition, unlike the above-mentioned samples, a Cu film containing no additive elements (a sprayed film composed of Cu alone) and a sprayed film composed of Cu—Al were also fabricated. At this time, regarding the sprayed coating made of a Cu—Al alloy, the Al content was set within a range of 6.7 to 11.1% by mass.
[0054] Table 1 shown bel...
PUM
| Property | Measurement | Unit |
|---|---|---|
| surface roughness | aaaaa | aaaaa |
| surface roughness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More