Laser beam splitting device and method based on cascaded acousto-optic deflection

Abstract

The invention discloses a laser beam splitting device and method based on cascaded acousto-optic deflection, belongs to the technical field of photoelectrons and lasers, and particularly comprises N identical acousto-optic deflection modules. The first acousto-optic deflection module receives incident light input at a Bragg diffraction angle theta B, the incident light deflects in the plane direction along a first ultrasonic field after being acted by the first ultrasonic field with adjustable injection power to form first-stage emergent light, and the emergent light which is not deflected serves as the incident light of the next-stage acousto-optic deflection module; the second acousto-optic deflection module to the Nth acousto-optic deflection module respectively receive emergent light which is not deflected by the previous acousto-optic deflection module, and enable the emergent light to deflect under the effect of an ultrasonic field to form second-stage emergent light to Nth-stageemergent light; the first-stage emergent light to the Nth-stage emergent light are parallel to each other. The invention aims to reduce the device cost and realize dynamic adjustment of laser energyon the basis of realizing adjustable energy beam splitting and laser collimation at the same time so as to meet various processing requirements.

Description

technical field [0001] The invention belongs to the field of optoelectronics and laser technology, and more specifically relates to a laser beam splitting device and method based on cascaded acousto-optic deflection. Background technique [0002] The beam splitter is a common device in the laser field, and its main function is to redistribute a beam of laser with high energy / power to improve processing efficiency. With the continuous improvement of laser technology, the power / energy of the output laser is also getting higher and higher, especially for ultrashort pulse lasers used in the field of precision raw processing, the increase in output power is obtained by increasing the single pulse energy on the one hand, and on the other hand On the one hand, it is achieved by increasing the output frequency. Therefore, for laser light sources with high repetition rate and high average power, beam splitting technology is usually used to realize parallel processing of multiple bea...

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Problems solved by technology

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a laser beam splitting device and method based on cascaded acousto-optic deflection, thereby solving the problem that the outgoing light of the traditional beam splitting device is usually non-parallel light, and a set of Fu The technical problem of collimating the Liye lens pair and not being able to adjust dynamically

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