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Gas mass flow controller and fault self-checking method

A gas mass flow, fault self-checking technology, applied in flow control, flow control using electrical devices, non-electric variable control, etc., can solve problems such as affecting product quality, affecting economic benefits, and difficulty in detection, and reducing equipment downtime. and maintenance time, improve economic efficiency, and reduce the effect of detection difficulty

Pending Publication Date: 2020-11-27
BEIJING SEVENSTAR FLOW CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] After the MFC has been working for a period of time, the accuracy will change due to the influence of the environment, gas or accidental factors. After a period of accumulation, the accuracy of the MFC will exceed the technical indicators of the product. Continued use in this case will affect Product quality is not even usable
In view of this situation, it is necessary to detect the accuracy of the MFC for troubleshooting. However, if the accuracy change of the MFC is small, the ordinary accuracy detection equipment cannot detect the accuracy change of the MFC, even if the high-precision detection equipment is used , limited by the on-site installation environment, it also brings difficulties to the detection
Therefore, it is often only possible to choose to return the MFC to the factory for maintenance, but this will consume a lot of equipment downtime and maintenance time. In addition, there will also be uncertain factors such as transportation safety during the transportation of mass flow controllers, which will affect the economy. benefit

Method used

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  • Gas mass flow controller and fault self-checking method

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0041] see figure 1 , the gas mass flow controller (hereinafter referred to as MFC) provided by this embodiment includes a solenoid valve 2, a solenoid valve control module 3, a solenoid valve drive circuit 4, a control module 6, a fault self-check module 7, a flow detection module 8 and Detection drive circuit 9. Wherein, the solenoid valve 2 is arranged on the controlled pipeline 1; the solenoid valve control module 3 is used to adjust the opening degree of the solenoid valve 2, so as to adjust the flow of gas flowing through the solenoid valve 2. The solenoid valve driving circuit 4 is used to provide driving electric energy, that is, a driving voltage to the solenoid valve control module 3 , so as to adjust the opening degree of the solenoid valve 2 .

[0042] The flow detection module 8 is used to detect the flow of gas flowing through the above-mentioned electromagnetic valve 2, and send out a flow analog signal, which is converted into a digital signal that can be proc...

no. 2 example

[0049] see image 3 , the gas mass flow controller provided in this embodiment is an improvement made on the basis of the above-mentioned first embodiment. Specifically, since the gas is greatly affected by temperature, under the same gas flow setting value, If the fluid temperature is different, the opening value of the solenoid valve 2 will be slightly different. In order to eliminate the influence of temperature, it is necessary to perform temperature compensation on the driving parameter value (driving voltage value or driving current value). For this reason, on the basis of the above-mentioned first embodiment, the gas mass flow controller also includes a temperature detection module 11 and a temperature compensation module 13, wherein the temperature detection module 11 is used to detect the current opening degree in the controlled pipeline 1 The current fluid temperature value corresponding to the value is sent to the temperature compensation module 13 after the A / D con...

no. 3 example

[0061] see Figure 4 , this embodiment provides a fault self-diagnosis method, which is applied to the gas mass flow controller provided in the first embodiment above, and the gas mass flow controller includes a solenoid valve 2, a solenoid valve control module 3 and a solenoid valve drive circuit 4 . The fault self-diagnosis method includes the following steps:

[0062] S1. According to the preset flow setting value, control the solenoid valve control module to adjust the opening of the solenoid valve to the opening value corresponding to the flow setting value;

[0063] S2. Receive the current driving parameter value of the solenoid valve corresponding to the opening value fed back by the solenoid valve control module;

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Abstract

The embodiment of the invention provides a gas mass flow controller and a fault self-checking method. The gas mass flow controller comprises an electromagnetic valve, an electromagnetic valve controlmodule used for adjusting the opening degree of the electromagnetic valve, an electromagnetic valve driving circuit used for providing driving electric energy for the electromagnetic valve control module, a fault self-checking module and a control module. The control module is used for controlling the electromagnetic valve control module to adjust the opening degree of the electromagnetic valve toan opening degree value corresponding to a preset flow rate set value according to the preset flow rate set value, receiving a current driving parameter value of the electromagnetic valve corresponding to the opening degree value fed back by the electromagnetic valve control module, and sending the current driving parameter value to the fault self-checking module; and the fault self-checking module is used for calculating the fault occurrence rate of the gas mass flow controller based on the current driving parameter value and a preset standard driving parameter value corresponding to the opening value. According to the technical scheme of the gas mass flow controller and the fault self-checking method, self-checking of flow precision, equipment faults and the like can be carried out in real time.

Description

technical field [0001] The invention relates to the technical field of mass flow detection, in particular to a gas mass flow controller and a fault self-inspection method. Background technique [0002] The gas mass flow controller (Mass Flow Controller, hereinafter referred to as MFC) is used for precise measurement and control of gas mass flow. MFC is mainly composed of shunt, flow detection sensor, flow control device and control device. The flow detection sensor detects the flow in the gas pipeline and sends out an analog flow signal, which is converted into a digital signal that can be processed by the control device through signal amplification processing and A / D conversion; the control device is based on the digital signal and user settings A fixed flow value is used to control the opening of the flow control device to achieve the purpose of precisely controlling the gas flow. [0003] After the MFC has been working for a period of time, the accuracy will change due ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D7/06
CPCG05D7/0635
Inventor 邹义涛赵迪
Owner BEIJING SEVENSTAR FLOW CO LTD
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