Shearing speckle interference system based on integrated phase shift reflector

Abstract

The invention discloses a shearing speckle interference system based on an integrated phase shift reflector. The shearing speckle interference system is composed of an integrated phase shift reflector, a camera, a laser, a beam expander and a measured object. The integrated phase shift reflector comprises a phase shift mirror and a shearing mirror, and the phase shift mirror is connected to an integrated phase shift reflector base through a phase shifter and is driven by the phase shifter to realize phase shift; the shearing mirror is connected to the integrated phase shift reflector base through a shearing adjusting device, and the posture of the shearing mirror is adjusted through the shearing adjusting device. The shearing mirror is annular and surrounds the phase shift mirror, a shearing machine and the phase shift mirror can be coplanar by adjusting the shearing adjusting device, the inner contour of the shearing mirror is slightly larger than the outer contour of the phase shiftmirror, and the posture of the shearing mirror can be adjusted. When shearing speckle interference measurement is carried out, laser emitted by the laser irradiates the measured object through the beam expander, and laser reflected by the measured object is reflected by the shearing mirror and the phase shift mirror to enter the camera for interference imaging. The system has the advantages of being high in laser utilization rate, large in view field, small in stray light influence and the like, and is particularly suitable for large-area shearing speckle interference detection.

Description

technical field [0001] The invention proposes an integrated phase-shift shear mirror suitable for shear speckle interference, which is applied to the optical path of shear speckle interference and belongs to the field of optical path structure of laser optical instruments. Background technique [0002] The shearing speckle interferometry uses the speckle formed by the laser on the rough screen, and uses a shearing interference device to divide the object light into two beams for interference imaging to obtain deformation information on the surface of the measured object. Shearing speckle interferometry does not require reference light, is insensitive to environmental disturbances, and has strong practicability. It is the first choice for engineering applications in speckle detection methods. However, there are also some problems in the existing shearing speckle interferometry devices, which limit the application of the shearing speckle interferometry. [0003] The most comm...

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Problems solved by technology

[0007] The technical problem to be solved by the present invention is: to overcome the shortcomings and limitations of the prior art, to provide a shearing speckle interference system based on an integrated phase-shift shearing mirror, and to solve the problem that the existing shearing device cannot take into account high laser utilization High efficiency, easy implementation of phase shift and adjustment of shear amount, simple structure, strong anti-interference, and large field of view to improve the performance of shearing devices and shearing speckle interference systems

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