Method for manufacturing chip packaging structure
A technology of chip packaging structure and manufacturing method, applied in the fields of semiconductor/solid-state device manufacturing, electrical components, electrical solid-state devices, etc. Connection reliability issues, effect of warpage reduction
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[0068] figure 1 It is a flowchart of a manufacturing method of a chip package structure according to an embodiment of the present invention. Figure 2 to Figure 6 yes figure 1 The schematic diagram of the intermediate structure corresponding to the process in .
[0069] First, refer to figure 1 Step S01 in figure 2 As shown, a multi-chip packaging structure 10 is provided. The multi-chip packaging structure 10 includes a first plastic encapsulation layer 100 and a plurality of dies 101 embedded in the first plastic encapsulation layer 100. Each die 101 includes a front side 101a and a back side 101b, the front side 101a has an electrical interconnection structure (not shown); the front side 101a is exposed to the outside of the first plastic encapsulation layer 100 .
[0070] Next, refer to figure 1 Step S02 in image 3 As shown, the external leads 11 are formed on the front side 101 a of each die 101 in the multi-die package structure 10 .
[0071] After that, refer to ...
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