Flexible mask and evaporation device

A mask plate, flexible technology, applied in the direction of vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of low efficiency, improve continuity, improve evaporation precision, improve uniformity and The effect of accuracy

Pending Publication Date: 2021-01-15
GUANGZHOU GOVISIONOX TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The application provides a flexible mask and an evaporation device to solve the technical problem of low efficiency in the evaporation process

Method used

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  • Flexible mask and evaporation device
  • Flexible mask and evaporation device
  • Flexible mask and evaporation device

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Embodiment Construction

[0022] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0023] The present application discloses a flexible mask. The flexible mask can be rolled, that is, the flexible mask can be wound on a rotating shaft or a roller. Furthermore, the material of the flexible mask can be an organic polymer such as PEN (polyethylene naphthalate), or flexible metal; it can be printed on the originally designed precision mask by silk screen printing The molded material is injected into the FMM mold. A patterned structu...

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Abstract

The invention discloses a flexible mask and an evaporation device. The flexible mask can be curled. In this way, technical support can be provided for dynamic evaporation, and the evaporation efficiency can be improved.

Description

technical field [0001] The application belongs to the field of display technology, and in particular relates to a flexible mask and an evaporation device. Background technique [0002] With the rapid development of display technology, flexible display has attracted great attention, including full-screen, bendable (even foldable, rollable, etc.), fixed-curve mobile phones will be widely used in the future market. Flexible display technology, especially rollable flexible display technology, can change the shape of display devices, increase the flexibility and diversity of display, and is expected to bring about major changes in the field of display technology. [0003] At present, the light-emitting layer of the rollable flexible screen is generally prepared by evaporation, but there is a problem of low efficiency. Contents of the invention [0004] The application provides a flexible mask plate and an evaporation device to solve the technical problem of low efficiency in t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24C23C14/56
CPCC23C14/042C23C14/24C23C14/562
Inventor 谢铭李明胜郑红
Owner GUANGZHOU GOVISIONOX TECH CO LTD
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