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Flexible transmission mechanism, reciprocating mechanism and lifting device

A technology of reciprocating motion mechanism and flexible transmission, which is applied in the direction of lifting device, lifting frame, mechanical conveyor, etc., can solve problems such as incorrect reset, damage of motion mechanism, motion jamming, etc., and achieve high reliability and high-precision positioning Effect

Active Publication Date: 2021-02-02
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] An object of the present invention is to provide a flexible transmission mechanism, aiming to solve the problem of motion jamming and damage to the motion mechanism caused by the non-parallel screw rod and guide rail in the lifting device
[0006] Another object of the present invention is to provide a reciprocating mechanism, aiming to solve the problems of the reciprocating movement of the mechanism being stuck and incorrect reset
[0007] Another object of the present invention is to provide a lifting device, aiming to solve the problems of the lifting movement being stuck and the reset incorrect

Method used

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  • Flexible transmission mechanism, reciprocating mechanism and lifting device
  • Flexible transmission mechanism, reciprocating mechanism and lifting device
  • Flexible transmission mechanism, reciprocating mechanism and lifting device

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0062] figure 2 It is a schematic structural diagram of the reciprocating mechanism provided by Embodiment 1 of the present invention. like figure 2 As shown, this embodiment provides a reciprocating mechanism, which includes a frame 11, a stage 12, a driving mechanism, a driven mechanism, a guiding mechanism and a flexible transmission mechanism. The driving mechanism, driven mechanism, guiding mechanism and flexible transmission mechanism are all installed on the bracket 11 . Wherein the driving mechanism includes a driving element, and the driven mechanism includes a driven element. The flexible transmission mechanism is respectively connected to the follower and the object stage 12, and the object stage 12 is installed on the guide mechanism.

[0063] The guide mechanism includes at least one set of guide rail slider mechanisms, taking one set as an example, specifically including matching sliders 13 and linear guide rails 14, and the linear guide rails 14 are install...

Embodiment 2

[0085] Figure 4 It is a structural schematic diagram of the lifting device provided by Embodiment 2 of the present invention. like Figure 4 As shown, this embodiment also provides a lifting device, which can not only realize the lifting of the reticle pattern box, but also realize other similar situations that require lifting. Specifically, the lifting device includes the reciprocating mechanism provided in Embodiment 1. At this time, the aforementioned Z direction is the vertical direction, and the X and Y directions are both horizontal directions. And the reciprocating mechanism provided in this embodiment is basically the same as that in Embodiment 1, so the specific structure of the reciprocating mechanism will not be described in detail in this embodiment, and in order to facilitate understanding and explanation, this embodiment is represented by different reference numerals reciprocating motion mechanism.

[0086] like Figure 4 As shown, the reciprocating mechanis...

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PUM

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Abstract

The invention relates to a flexible transmission mechanism, a reciprocating mechanism and a lifting device. High-precision transmission can be achieved, and the reliability of motion is ensured. The reciprocating mechanism comprises a rack, an objective table, a driving part, a driven part, a guide mechanism and the flexible transmission mechanism, the guide mechanism at least comprises a guide rail sliding block mechanism, the objective table is installed on a sliding block of the guide rail sliding block mechanism, and the flexible transmission mechanism is connected with the driven part andthe objective table. During actual application, the driving part is used for driving the driven part to move in the axial direction, the driven part is used for driving the objective table to move ona linear guide rail of the guide rail sliding block mechanism in the Z direction through the flexible transmission mechanism, and the flexible transmission mechanism can drive the objective table tomove in the X direction and the Y direction relative to the driven part. In this way, even if the guide rail and the driven part doing linear motion are not parallel, smooth operation of the mechanismcan be guaranteed.

Description

technical field [0001] The invention relates to a flexible transmission mechanism, a reciprocating mechanism and a lifting device. Background technique [0002] In the current semiconductor photolithography process, a plate library for storing the mask pattern box is required. Most of the reticle magazines used in the prior art can accommodate multiple reticle pattern boxes, and each reticle pattern box can be taken and placed by a set of lifting devices. [0003] In the current lifting device, there are configured a plate rack bearing platform and a plate box cover bearing platform, the plate frame bearing platform is fixedly arranged, and the plate box cover bearing platform can move up and down relative to the plate holder bearing platform. In more detail, the reticle pattern box is placed on the plate holder platform, and the plate box cover platform cooperates with the cover of the reticle pattern box to realize the opening and locking of the reticle pattern box. Curr...

Claims

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Application Information

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IPC IPC(8): B65G35/00B66F7/14B66F7/28
CPCB65G35/00B66F7/14B66F7/28
Inventor 李冰陈淮阳郑教增庞飞郝凤龙
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD