Flexible pressure sensor with pressure-sensitive structure

Abstract

The invention discloses a flexible pressure sensor with a pressure-sensitive structure. The flexible pressure sensor is composed of an upper electrode, a lower electrode and the flexible pressure-sensitive structure located between the upper electrode and the lower electrode. The flexible pressure-sensitive structure comprises at least one pressure-sensitive sparse layer. On the basis of the flexible sensor, the pressure-sensitive sensor structure is obtained by changing the composition mode of the pressure-sensitive structure, changing the main components of the pressure-sensitive material inthe pressure-sensitive structure and sputtering the metal layer on the outer surface of the pressure-sensitive structure, and the performance of the pressure-sensitive sensor structure is greatly improved compared with that of a traditional piezoresistive pressure sensor. The sensitivity is improved by more than two times, and the pressure sensor has good flexibility and large deformation, can beused in a complex environment without affecting the detection performance of the pressure sensor, and is one of the optimal options for improving the sensitivity and the flexibility of the pressure sensor.

Description

technical field [0001] The invention belongs to the technical field of pressure sensors, and in particular relates to a flexible pressure sensor with a pressure-sensitive structure. Background technique [0002] In recent years, piezoresistive pressure sensors are made using the piezoresistive effect of semiconductor materials. The so-called "piezoresistive effect" refers to the sensing materials such as semiconductors, metals or composite materials under external stress (bending, compression, stretching, etc.) Under the influence of the sensor, the energy band structure or the conductive network changes, which causes the resistivity of the sensing material to change. Therefore, the pressure sensor can be measured through the change of the resistance value. [0003] Traditional rigid sensors are based on silicon-based materials and structures, and have the characteristics of small size and high sensitivity. However, this type of sensor is hard and non-flexible, resulting in ...

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Problems solved by technology

[0005] The present invention aims to provide a flexible pressure sensor with a pressure-sensitive structure, which solves the problems of poor uniformity, poor consistency and low precision of existing MEMS pressure sensors

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