Time monitoring and management method and system for manufacturing process of equipment based on chain type triggering

Abstract

The invention relates to a time monitoring and management method and system for the manufacturing process of equipment based on chain type triggering. The time monitoring and management method comprises the steps of carrying out the manufacturing process according to the sequence of all action events in a processing process after a product enters the equipment, and if the previous set of time monitoring module receives the end event of the corresponding action event and does not trigger the monitoring alarm, taking the end event received by the previous set of time monitoring module as the start event of the next set of time monitoring module; and performing the subsequent monitoring process according to the chain type triggering mode until the last set of monitoring module receives an endevent, and indicating that the time monitoring of the whole complete manufacturing process of the current product is completed. The time monitoring and management is performed on each action event inthe manufacturing process of the product, and no matter what mechanism of the equipment has the abnormal condition of pausing execution, the abnormal condition can be found immediately and the alarmcan be triggered, so that the accuracy of monitoring and management in the manufacturing process of the equipment is greatly improved, and the product rejection rate and the productivity loss of a factory are reduced.

Description

technical field [0001] The invention relates to the technical field of equipment process management, in particular to a method and system for monitoring and managing equipment process time based on chain triggering. Background technique [0002] During the process of semiconductor and panel engineering equipment, the product is transported to the equipment by personnel or the automatic transmission system, and the equipment transmits the product to different process chambers inside it for the process; during this period, due to the abnormality of the equipment itself, the product may enter the equipment. An abnormal situation of suspension of execution occurs on any internal mechanism; thus, a special system is required to monitor and manage the process time of the equipment in the project, so as to prevent the equipment from suspending the execution of related processes for a long time, resulting in product scrapping or factory capacity Loss. Therefore, how to monitor and ...

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Problems solved by technology

[0002] During the process of semiconductor and panel engineering equipment, the product is transported to the equipment by personnel or the automatic transmission system, and the equipment transmits the product to different process chambers inside it for the process; during this period, due to the abnormality of the equipment itself, the product may enter the equipment. An abnormal situation of suspension of execution occurs on any internal mechanism; thus, a special system is required to monitor and manage the process time of the equipment in the project, so as to prevent the equipment from suspending the execution of related processes for a long time, resulting in product scrapping or factory capacity Loss

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