Three-chamber coating machine for narrow spaces
A coating machine and space technology, applied in the field of vacuum coating, can solve the problems of affecting the flow of the workpiece, large size, inconvenient loading and unloading of the coating machine, etc., and achieve the effect of improving the coating efficiency
Active Publication Date: 2022-06-28
XIANGTAN HONGDA VACUUM TECH CO LTD
View PDF0 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, the existing coating machines are generally large in size, and when the workshop area is small, it will cause inconvenient loading and unloading of the coating machine, which will affect the circulation of workpieces
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0020] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
[0021] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relationship between various components under a certain posture (as shown in the accompanying drawings). The relative positional relationship, the movement situation, etc., if the specific posture changes, the directional indication also changes accordingl...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a three-chamber coating machine applied in a narrow space. The three-chamber coating machine applied in a narrow space includes a first circulation platform, a first processing chamber, a coating chamber, a second processing chamber, a second circulation platform, a connecting platform and multiple a carrier, the two sides of the coating chamber communicate with the first processing chamber and the second processing chamber respectively, and the side of the first processing chamber away from the coating chamber communicates with the first flow platform , the side of the second processing chamber away from the coating chamber communicates with the second circulation platform, one end of the connection platform communicates with the first circulation platform, and the other end of the connection platform communicates with the The second circulation platform is connected so that the first circulation platform, the connection platform and the second circulation platform are U-shaped, and the carrier is used to carry workpieces and circulate in the coating machine. The invention provides a three-chamber coating machine suitable for use in narrow spaces.
Description
technical field [0001] The invention relates to the field of vacuum coating, in particular to a three-chamber coating machine applied to a narrow space. Background technique [0002] Vacuum coating is a relatively cutting-edge coating technology at present, and the magnetron sputtering coating method in vacuum coating uses an electrified anode to release electrons, and makes the electrons collide with gas molecules in a vacuum chamber under the acceleration of an electric field, so that gas molecules Ionization, and the ionized gas molecules bombard the metal particles on the cathode under the action of the electric field, so that the metal particles are ionized and sputtered, and the ionized metal ions are deposited on the surface of the workpiece to form a thin film. The gas molecules collide to improve the ionization rate of the gas molecules. The magnetron cathode is formed by inserting a magnet inside the cathode. Therefore, under the combined action of the electric fie...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/56C23C14/35C23C14/50C23C14/02
CPCC23C14/568C23C14/35C23C14/505C23C14/022
Inventor 唐莲杨恒祝海生唐洪波梁红孙桂红黄乐黄国兴
Owner XIANGTAN HONGDA VACUUM TECH CO LTD