Substrate edge washing method, edge washing device and substrate
A substrate and edge washing technology, applied in nonlinear optics, instruments, optics, etc., can solve the problem of inaccurate judgment of edge washing amount, and achieve the effect of improving cleaning efficiency
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[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.
[0034] In the embodiments of the present invention, it should be understood that terms such as "comprising" or "having" are intended to indicate the presence of features, numbers, steps, acts, components, parts or combinations thereof disclosed in this specification, and are not intended to The possibility that one or more other features, numbers, steps, acts, parts, parts or combinations thereof exist or be added is excluded.
[0035] Embodiments of the present application prov...
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