A machine program control method and device

Abstract

The embodiment of the present application discloses a machine program control method and device, which includes determining the bottleneck unit with the longest processing time among the processing units according to the processing time of each processing unit in the machine for each subroutine, and the program of the bottleneck unit Add the first pseudo-subroutine in the program, the first pseudo-subroutine is called before at least one subroutine in the program of the bottleneck unit, when the first pseudo-subroutine is called, the wafer passes through the bottleneck unit without being processed by the bottleneck unit, This is because, in the process of wafer processing by the bottleneck unit, some wafers must pass through the bottleneck unit but do not need to be processed by the bottleneck unit. In the embodiment of the present application, the first dummy subroutine can be added to the program of the bottleneck unit, The stacked wafers can pass through the bottleneck unit, reducing wafer stacking, improving wafer processing efficiency, and increasing the productivity of the entire machine.

Description

technical field [0001] The present application relates to the field of semiconductor device manufacturing, in particular to a machine program control method and device. Background technique [0002] At present, in the semiconductor manufacturing industry, semiconductor manufacturing factories have to produce a wide variety of semiconductor devices in different quantities at the same time, and various types of semiconductor devices have different processing techniques, different processing time periods, and different processing quantities. Various types of semiconductor devices Delivery dates and delivery quantities requested by customers also vary. Under such complex conditions, how to improve the production efficiency of machines has increasingly become the key to the survival and development of semiconductor companies in the fierce competition. [0003] In recent years, the semiconductor manufacturing industry generally requires improvement of management level to minimize...

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Problems solved by technology

[0005] With the complexity of the semiconductor process, Track recipes are also gradually increasing. When these different Track recipes are mixed and run, there are many bottleneck units, which leads to the current production capacity (Wafer Per Hour, WPH) of the machine to be improved.

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