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Area array detector calibration method and system and integrating sphere uniformity calibration method

A technology of an area array detector and a calibration method, which is applied in the field of optical testing and can solve the problems of spatial inhomogeneity error of output light of integrating sphere and temporal stability error of light source, etc.

Active Publication Date: 2021-03-23
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

However, as the calibration accuracy requirements for imaging systems and devices are getting higher and higher, the time stability error of the light source of the general integrating sphere light source itself and the spatial non-uniformity error of the output light of the integrating sphere can no longer meet the requirements of high-precision calibration.

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  • Area array detector calibration method and system and integrating sphere uniformity calibration method
  • Area array detector calibration method and system and integrating sphere uniformity calibration method
  • Area array detector calibration method and system and integrating sphere uniformity calibration method

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Embodiment Construction

[0096] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0097] Such as figure 1 As shown, the calibration system of this embodiment is composed of a uniform light source device, a temporal stability calibration module and a spatial uniformity calibration module. The time stability calibration module is used to collect the energy of the integrating sphere in real time to provide the time stability correction coefficient for the test data of the calibrated area array detector. The spatial uniformity calibration module is used to calibrate the surface uniformity of the output port of the integrating sphere. The spatial stability correction coefficient is determined by photographing the calibration coordinate plate with the calibrated area detector.

[0098] The uniform light source device includes a light source 1, an electric diaphragm 2 and an integrating sphere 3. The light source 1 and the electr...

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Abstract

The invention provides an area array detector calibration method and system and an integrating sphere uniformity calibration method, and solves the problem of test errors caused by time-dependent change of the brightness of an integrating sphere light source and spatial non-uniformity of output light. The method comprises the steps of establishing a system, obtaining a space uniformity correctioncoefficient, obtaining a time stability correction coefficient, and substituting the two correction coefficients into data collected by a calibrated area array detector to obtain calibrated data. Thesystem comprises a light source, an integrating sphere, a data acquisition control system, a time synchronization system, a photoelectric detector A, a photoelectric detector B and a calibration coordinate plate, the light source and the photoelectric detector A are arranged on the integrating sphere; the photoelectric detector A, the photoelectric detector B and the time synchronization system are connected with the data acquisition control system; the time synchronization system is connected with the calibrated area array detector; the calibration coordinate plate and the photoelectric detector B are positioned at a light outlet of the integrating sphere; according to the invention, test errors caused by time and space influences can be reduced.

Description

technical field [0001] The invention belongs to the field of optical testing, and relates to a calibration method and system for an area array detector. [0002] technical background [0003] Integrating sphere is a fasting sphere whose inner wall is coated with white diffuse reflective material, also known as photometric sphere and light flux sphere. Place the light source in the integrating sphere, the light emitted by the light source undergoes countless diffuse reflections on the inner wall of the sphere, and after full integration, the final light spot on the plane of the light outlet of the integrating sphere is a very uniform diffused light. It is mainly used for calibration and correction of imaging systems and devices in the laboratory. [0004] It is generally believed that the integrating sphere light source has high temporal stability and spatial uniformity, and its temporal stability can generally reach 98%, and its spatial uniformity can reach 98%. However, as...

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Application Information

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IPC IPC(8): G01J1/00
CPCG01J1/00
Inventor 曹昆刘尚阔周艳赵建科刘锴李坤昌明
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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