Area array detector calibration method and system and integrating sphere uniformity calibration method
A technology of an area array detector and a calibration method, which is applied in the field of optical testing and can solve the problems of spatial inhomogeneity error of output light of integrating sphere and temporal stability error of light source, etc.
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[0096] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0097] Such as figure 1 As shown, the calibration system of this embodiment is composed of a uniform light source device, a temporal stability calibration module and a spatial uniformity calibration module. The time stability calibration module is used to collect the energy of the integrating sphere in real time to provide the time stability correction coefficient for the test data of the calibrated area array detector. The spatial uniformity calibration module is used to calibrate the surface uniformity of the output port of the integrating sphere. The spatial stability correction coefficient is determined by photographing the calibration coordinate plate with the calibrated area detector.
[0098] The uniform light source device includes a light source 1, an electric diaphragm 2 and an integrating sphere 3. The light source 1 and the electr...
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