Calibration structure of optical fiber probe array and calibration method thereof

Abstract

The embodiment of the invention provides a calibration structure of an optical fiber probe array and a calibration method thereof. The calibration structure comprises a plurality of photoelectric detectors and a plurality of grating couplers, wherein the photoelectric detectors can be in one-to-one correspondence with at least two probes in the arrangement direction of the optical fiber probe array; the photoelectric detectors are used for converting the test light beams from the corresponding probes into electric signals; the grating coupler can be in one-to-one correspondence with the at least two probes in the arrangement direction corresponding to the optical fiber probe array, the grating coupler is used for transmitting the test light beams to the corresponding probes or receiving the test light beams from the corresponding probes, and the calibration structure and the calibration method provided by the embodiment of the invention are relatively low in cost and high in calibration efficiency.

Description

technical field [0001] The present application relates to the technical field of semiconductor integration, in particular to a calibration structure of an optical fiber probe array and a calibration method thereof. Background technique [0002] In the prior art, the calibration of the fiber optic probe array usually uses a calibration sheet, which requires high-precision equipment to measure the optical path of the test beam emitted by the probe to calibrate the position of the fiber optic probe array. The structure of the calibration sheet is complicated, and the calibration method is complicated. Contents of the invention [0003] In view of this, the embodiment of the present application expects to provide a simple calibration structure and calibration method of the fiber optic probe array. In order to achieve the above beneficial effects, the technical solution of the embodiment of the present application is implemented as follows: [0004] An embodiment of the present...

AI Technical Summary

Problems solved by technology

[0002] In the prior art, the calibration of the fiber probe array usually uses a calibration sheet, which requires high-precision equipment to measure the optical path of the test beam emitted by the probe to calibrate the fiber probe The location of the array, the structure of the calibration sheet is complicated, and the calibration method is complicated

Images