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Novel Fabry-Perot tunable filter

A technology of tuning filter and Fab, applied in the field of infrared detection, can solve the problems of affecting the filtering performance, large driving voltage, large deformation, etc., achieve good filtering characteristics, meet the effect of low-voltage driving and mirror smoothness

Inactive Publication Date: 2021-04-09
镇江爱豪科思电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, the Fabry-Perot filter based on MEMS technology has problems such as large driving voltage, small tunable range and large deformation, which affect the filtering performance.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] A new type of Fabry-Perot tunable filter disclosed in Embodiment 1 of the present invention adopts a double-folded cantilever beam structure, and etches the cantilever beam to form a rectangular groove. The movable thin layer refers to the Voltage generates electrostatic attraction, and moves up and down under the action of electrostatic attraction. The new Fabry-Perot tunable filter with this structure can obtain a displacement of 0.88μm at 8V, and its maximum stress is only 8.49MPa when the displacement is 0.5μm, and the mirror flatness error is only 0.9 nm. Therefore, the new Fabry-Perot filter with a rectangular slot cantilever beam can well meet the low-voltage drive, the mirror surface is flat, and it always maintains good filtering characteristics in the tunable range.

preparation example 1

[0017] The preparation process of the novel Fabry-Perot tunable filter is:

[0018] Step 1: On the upper surface of the single crystal silicon substrate, a film system of Sub / LHLHLH 6 layers alternately stacked is deposited by vacuum thermal evaporation thin film deposition process to form a reflective layer, and patterned by etching process. H and L represent a 1 / 4 central wavelength optical thickness of film layer Ge (high refractive index material layer) and film layer SiO (low refractive index material layer) respectively, central wavelength λ=4260nm, 1H=(4n H d) / λ; 1L=(4n L d) / λ.

[0019] Step 2: On the single crystal silicon substrate coated with a reflective layer, deposit a layer of gold (Au) layer as an electrode for electrostatic attraction with a magnetron sputtering deposition process, with a thickness of 300nm, and use an etching process for patterning .

[0020] Step 3: On the lower surface of the silicon substrate, a SiO film is deposited by a vacuum thermal ...

preparation example 2

[0026] The preparation process of the novel Fabry-Perot tunable filter is:

[0027] Step 1: On the lower surface of the monocrystalline silicon substrate, a SiO film is deposited by a vacuum thermal evaporation film deposition process to form an anti-reflection layer with a thickness of 1 / 4 the optical thickness of the central wavelength, and the central wavelength λ=4260nm, and patterned by an etching process change.

[0028] Step 2: On the upper surface of the single crystal silicon substrate, a film system of Sub / LHLHLH 6 layers alternately stacked is deposited by vacuum thermal evaporation thin film deposition process to form a reflective layer, and patterned by an etching process. H and L represent a 1 / 4 central wavelength optical thickness of film layer Ge (high refractive index material layer) and film layer SiO (low refractive index material layer) respectively, central wavelength λ=4260nm, 1H=(4n H d) / λ; 1L=(4n L d) / λ.

[0029] Step 3: In the electrode working area...

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Abstract

The invention belongs to the field of infrared detection, and relates to a novel Fabry-Perot tunable filter. Monocrystalline silicon is used as a substrate, and a reflecting layer formed by alternately depositing a metal electrode and germanium / silicon monoxide is plated on the upper part of the substrate; and an antireflection layer formed by a silicon monoxide film is plated at the lower part of the substrate. Meanwhile, monocrystalline silicon is adopted as a movable thin layer, and the upper portion of the movable thin layer is plated with an anti-reflection layer composed of a silicon monoxide thin film; and a reflecting layer formed by alternately depositing germanium / silicon monoxide is plated on the lower part of the movable film. A double-folding cantilever beam structure is adopted, and a cantilever beam is etched to form a rectangular groove, so that low-voltage driving can be well met, a mirror surface is smooth, and a good filtering characteristic is always kept in a tunable range. Moreover, an air cavity is adopted as a tuning cavity, the depth of the cavity is 2.5 microns, and selective transmission of a 3-5-micron waveband spectrum can be realized.

Description

technical field [0001] The invention belongs to the field of infrared detection, and relates to a novel Fabry-Perot tunable filter, which adopts a double-folded cantilever beam structure, and etches the cantilever beam to form rectangular slots. Background technique [0002] Infrared spectroscopy is a powerful analytical tool because many substances can be reliably distinguished based on their unique absorption spectra. Traditional infrared spectrometers are complex in structure, expensive and limited in portability. Applications such as medical diagnosis and healthcare (e.g. detection of gases in human breath), detection of hazardous substances (e.g. flammable and toxic gases, detection of explosives), process monitoring in the pharmaceutical and chemical industries, etc. There is a strong demand for spectrometers with high reliability and portability. Therefore, the miniature tunable infrared spectrometer has always been a hot spot in scientific research and market deman...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/28G02B26/00
CPCG01J3/28G02B26/001
Inventor 黄清伟候海港黄颖璞
Owner 镇江爱豪科思电子科技有限公司
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